关键词: 表面粗糙度, 超精密磨削, 随机表面

Abstract: Ultra-precision grinding is an effective and main technique to conduct micro/nano machining. It is one of the significant research fields to investigate machining mechanism and know clearly the connotation of machined surface generation. A novel methodology of machined surface generation in ultra-precision grinding is presented. Based on Johnson tranformation method and linear filter technique, the digital generation method of surface topography of the grinding wheel is provided. This method overcomes the shortcomings of the experimental method to achieve the required topography of grinding wheel, thus improving the computational accuracy during the grinding surface generation. Based on the grinding kinematics, the motion track equation of the abrasive grain is established, and the methods to determine the mutual interference condition of the abrasive grains and the effective grains are also provided. Accordingly, the algorithm of machined surface generation during ultra-precision grinding is developed. Computational analyses are utilized to generate the wheel surface with different statistic characteristics, thereby obtaining the topographies of machined surfaces under different machining parameters. Simulation verify the accuracy and effectiveness of the given algorithm.

Key words: Random surface, Surface roughness, Ultra-precision grinding