• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

机械工程学报 ›› 2015, Vol. 51 ›› Issue (2): 198-206.doi: 10.3901/JME.2015.02.198

• 交叉与前沿 • 上一篇    

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基于广义PI逆模型的超精密定位平台复合控制

田艳兵1, 2王 涛1王美玲1   

  1. 1.北京理工大学自动化学院 北京 100083;
    2.青岛理工大学自动化工程学院 青岛 266520
  • 出版日期:2015-01-20 发布日期:2015-01-20
  • 基金资助:
    国家自然科学基金(51375045)和流体动力与机电系统国家重点实验室开放基金(JZKF-201214)资助项目

Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model

TIAN Yanbing1, 2WANG Tao1WANG Meiling1   

  1. School of Automation, Beijing Institute of Technology, Beijing 100083;Automation Engineering College, Qingdao Technological University, Qingdao 266520
  • Online:2015-01-20 Published:2015-01-20

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摘要： 为了提高超精密定位系统的定位精度和行程，设计一种新型的单级驱动气动伺服定位平台。以金属波纹管为执行机构，以气浮导轨支撑，研究无摩擦条件下的较大行程的精密控制。为减少建立PI模型时的算子数量，减小求逆过程的计算量，提高建模精度，改进基本迟滞算子，建立基于广义迟滞算子的广义PI模型，并对模型进行验证。给出广义PI模型的求解析逆方法。设计基于广义PI逆模型的复合控制方案，并进行试验研究。结果表明，基于广义逆模型的阶跃响应系统的定位精度达到30 nm，锯齿波和复频跟踪试验输入下，基于PI逆模型的跟踪精度平均误差为0.96 μm和0.63 μm，基于广义PI逆模型的跟踪精度平均误差为0.49 μm和0.45 μm。试验数据表明改进广义PI模型对于增加系统定位精度有效。

关键词: 波纹管, 超精密, 复合控制, 广义迟滞, 角接触球轴承 动力学 加减速过程

Abstract: In order to improve the accuracy and stroke of the ultra-precision positioning stage, a new type of pneumatic servo positioning stage with single driving device is designed. Metal bellows are used as driving device in the positioning stage, the stage is supported by air flotation sliders to realize large stoke and ultra-precision positioning. In order to reduce the number of operators and to improve modeling accuracy, hysteresis operators are modified to build the generalized PI model, and the model is validated too. A solution of the inverse generalized PI model is given. The compounding controller is designed based on inverse generalized PI model. Experiments are implemented on the step signal, sawtooth signal and multifrequency signal. The results show that the positioning accuracy of the step response is less than 30 nm, the average tracking errors on sawtooth and multifrequency input are 0.96 μm and 0.63 μm based on the PI model, and the average tracing errors are 0.49 μm,and 0.45 μm based on generalized PI model. Experiments show that the generalized PI model is effective for increasing the positioning accuracy of the stage.

Key words: bellows, compounding control, generalized hysteresis, ultra-precision

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