光刻机超精密运动台数据驱动MIMO定结构前馈控制

doi:10.3901/JME.2023.21.099

机械工程学报 ›› 2023, Vol. 59 ›› Issue (21): 99-109.doi: 10.3901/JME.2023.21.099

• 特邀专栏：高性能超精密制造 • 上一篇下一篇

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光刻机超精密运动台数据驱动MIMO定结构前馈控制

李敏¹, 陈涛涛¹, 鲁森², 杨开明², 朱煜², 胡楚雄²

1. 中国地质大学(武汉)机械与电子信息学院武汉 430074;
2. 清华大学机械工程系北京 100084

收稿日期:2023-01-09 修回日期:2023-06-01 出版日期:2023-11-05 发布日期:2024-01-15
通讯作者: 杨开明(通信作者)，男，1970年出生，博士，副研究员，硕士研究生导师。主要研究方向为运动控制、精密驱动、超精密测量及信号处理。E-mail：yangkm@tsinghua.edu.cn
作者简介:李敏，女，1990年出生，博士，教授，博士研究生导师。主要研究方向为精密/超精密动力学建模、数据驱动控制理论与应用、智能学习与预测。E-mail：minli@cug.edu.cn；朱煜，男，1965年出生，博士，长聘教授，博士研究生导师。主要研究方向为精密测量与控制理论、超精密机械设计与制造、电子制造装备及其系统等。E-mail：zhuyu@tsinghua.edu.cn
基金资助:
国家自然科学基金(52275072)和国家科技重大专项(2017ZX02102004)资助项目。

Data-driven MIMO Fixed-structure Feedforward Control for Ultra-precision Motion Stages of Lithographic Scanners

LI Min¹, CHEN Taotao¹, LU Sen², YANG Kaiming², ZHU Yu², HU Chuxiong²

1. School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074;
2. Department of Mechanical Engineering, Tsinghua University, Beijing 100084

Received:2023-01-09 Revised:2023-06-01 Online:2023-11-05 Published:2024-01-15

摘要/Abstract

摘要： 超精密多输入多输出(Multiple-input multiple-output,MIMO)运动台是集成电路制造装备——光刻机的核心部件之一，其轨迹跟踪性能是保证光刻机产率和分辨率的关键。提出一种高效的数据驱动MIMO定结构前馈控制方法，有效补偿参考轨迹引入的伺服误差，降低各自由度间的耦合，从而提高光刻机超精密运动台对不同轨迹跟踪任务的适应性及跟踪性能。采用多项式对MIMO前馈控制器进行参数化，以保证前馈控制器的固有稳定性及其对变轨迹的鲁棒性。利用脉冲响应实验法无偏估计过程灵敏度函数矩阵的马尔可夫参数，进而建立高效的数据驱动参数优化算法，根据伺服系统的输入-输出数据迭代优化MIMO前馈控制器参数。所提方法无需对光刻机运动台建模，且每次迭代仅需一次轨迹跟踪实验。将所提方法应用于课题组自主研发的光刻机硅片台，2种参考轨迹的跟踪实验结果验证所提方法在有效提高轨迹跟踪性能的同时降低各自由度间的耦合。

关键词: 前馈控制, MIMO, 数据驱动, 光刻机, 超精密运动台

Abstract: The ultra-precision multiple-input multiple-output (MIMO) motion stage is an important mechatronic unit of industrial lithographic scanners for manufacturing integrated circuits, and its excellent tracking performance is the key to ensure the throughput and resolution. An efficient data-driven fixed-structure MIMO feedforward control approach is synthesized for the ultra-precision motion stage to reduce the coupling among multiple degrees of freedom and enhance tracking performance in view of varying references. Specifically, the MIMO feedforward controller is parameterized with the polynomial basis functions. As a result, the inherent stability and robustness against varying references are guaranteed for the MIMO feedforward controller. The Markov parameters of the process sensitivity function matrix are unbiasedly estimated by using impulse response experiment. Then, an efficient data-driven parameter optimization algorithm is developed such that the optimal parameters of the MIMO feedforward controller can be iteratively solved based entirely on the measured data. The proposed approach requires no parametric model of the ultra-precision motion stage, and needs only one tracking experiment in each iteration. The proposed approach is applied to a wafer stage of an industrial lithographic scanner. By tracking 2 different references, the experimental results illustrate that the proposed approach effectively improves the tracking performance and reduces the coupling among the multiple degrees of freedom.

Key words: feedforward control, MIMO, data driven, lithographic scanners, ultra-precision motion stage

中图分类号:

TG156

李敏, 陈涛涛, 鲁森, 杨开明, 朱煜, 胡楚雄. 光刻机超精密运动台数据驱动MIMO定结构前馈控制[J]. 机械工程学报, 2023, 59(21): 99-109.

LI Min, CHEN Taotao, LU Sen, YANG Kaiming, ZHU Yu, HU Chuxiong. Data-driven MIMO Fixed-structure Feedforward Control for Ultra-precision Motion Stages of Lithographic Scanners[J]. Journal of Mechanical Engineering, 2023, 59(21): 99-109.

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光刻机超精密运动台数据驱动MIMO定结构前馈控制

Data-driven MIMO Fixed-structure Feedforward Control for Ultra-precision Motion Stages of Lithographic Scanners

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