基于微动特性分析的精密线性平台微行程重复定位精度表征与补偿

doi:10.3901/JME.2023.21.110

机械工程学报 ›› 2023, Vol. 59 ›› Issue (21): 110-120.doi: 10.3901/JME.2023.21.110

• 特邀专栏：高性能超精密制造 • 上一篇下一篇

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基于微动特性分析的精密线性平台微行程重复定位精度表征与补偿

唐皓¹, 张贺¹, 张栋¹, 高贵兵¹, 郑煜²

1. 湖南科技大学机电工程学院湘潭 411201;
2. 中南大学机电工程学院长沙 410083

收稿日期:2023-01-23 修回日期:2023-07-11 出版日期:2023-11-05 发布日期:2024-01-15
作者简介:唐皓，男，1988年出生，副教授，硕士研究生导师。主要研究方向为复杂精密系统误差分析。E-mail：tanghao@hnust.edu.cn
基金资助:
国家自然科学基金(51705149)、湖南省教育厅优秀青年(20B212)和湖南省研究生科研创新(CX20210996)资助项目。

Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis

TANG Hao¹, ZHANG He¹, ZHANG Dong¹, GAO Guibing¹, ZHENG Yu²

1. School of Mechanical Engineering, Hunan University of Science and Technology, Xiangtan 411201;
2. College of Mechanical and Electronical Engineering, Central South University, Changsha 410083

Received:2023-01-23 Revised:2023-07-11 Online:2023-11-05 Published:2024-01-15

摘要/Abstract

摘要： 重复定位精度是衡量运动系统精确性和稳定性的关键指标。以广泛应用于精密/超精密工程领域的精密线性平台为对象，针对微行程尺度下重复定位精度信息表征不清晰，误差补偿不精确等问题开展研究。首先，分析精密线性平台机械结构，辨识误差源并获取敏感误差项；其次，求解丝杠螺母副等效刚度、丝杠螺母副等效摩擦、直线导轨等效摩擦等物理信息，分析微行程(<0.1 mm)下精密线性平台微动特性，建立微行程尺度下动力学微分方程；最后，综合建立精密线性平台重复定位精度的误差模型，基于统计学规律计算其重复定位精度分布特性。通过不同行程(10 mm,0.1 mm,0.01 mm)测量试验可知，各带宽区间与理论值基本相等，表明重复定位精度数值与行程无直接关系，且位移-时间、速度-时间曲线均和仿真曲线趋势相同，证明了模型的精确性。调整材料属性后，新平台重复定位精度与误差模型预测值基本接近，同时结果优于原平台，证明了所提出精密线性平台微行程重复定位精度表征与补偿方法的可行性。该方法对于提升精密线性平台微行程重复定位精度具有重要意义。

关键词: 精密线性平台, 重复定位精度, 动力学, 刚度, 摩擦

Abstract: Repeatability is an essential index for judging the moving accuracy and stability. A precise linear stage widely used in precise/super-precision engineering region is analyzed, and a series of researches are proposed to solve these problems including repeatability characterization unclearly and error compensation inaccurately. Firstly, the structure of precise linear stage is analyzed, and sensitive error terms are developed; secondly, the equivalent stiffness of the bearing-screw joint, the equivalent stiffness of the screw nut pair, the equivalent friction of the screw nut pair and the equivalent friction of the linear guides are calculated, respectively. The micro-dynamics of precise linear stage (<0.1 mm) is analyzed, and the dynamic equation of the precise linear stage is established. Finally, a comprehensive error model for repeatability of precise linear stage is established, and the distribution characteristic of repeatability based on statistics is computed. A series of measurement experiments are proposed in different displacement scales (10 mm, 0.1 mm, 0.01 mm). The width of repeatability is in coincidence with theoretical value in full stroke, which means the values of repeatability are not related to displacement. The relationships of displacement-time and velocity-time have the same trend with simulated results. in micro-scale displacement, and the error model accuracy is proved. By changing the material property, the value of repeatability is closed to predicted value, and the results are better than former stage, so that the error model can be adopted in repeatability prediction and compensation. This method has significantly meaning for repeatability improvement in micro displacement scale of precise linear stage.

Key words: precise linear stage, repeated positioning accuracy, dynamic, stiffness, friction

中图分类号:

TH115

唐皓, 张贺, 张栋, 高贵兵, 郑煜. 基于微动特性分析的精密线性平台微行程重复定位精度表征与补偿[J]. 机械工程学报, 2023, 59(21): 110-120.

TANG Hao, ZHANG He, ZHANG Dong, GAO Guibing, ZHENG Yu. Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis[J]. Journal of Mechanical Engineering, 2023, 59(21): 110-120.

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基于微动特性分析的精密线性平台微行程重复定位精度表征与补偿

Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis

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