基于微动特性分析的精密线性平台微行程重复定位精度表征与补偿
唐皓, 张贺, 张栋, 高贵兵, 郑煜
Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis
TANG Hao, ZHANG He, ZHANG Dong, GAO Guibing, ZHENG Yu
机械工程学报
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2023, (21): 110
-120
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DOI: 10.3901/JME.2023.21.110
