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田艳兵, 王涛, 王美玲

Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model

TIAN Yanbing, WANG Tao, WANG Meiling

机械工程学报 . 2015, (2): 198 -206 . DOI: 10.3901/JME.2015.02.198