化学镀NiP的凸面闪耀光栅超精密切削特性研究

doi:10.3901/JME.2023.21.121

机械工程学报 ›› 2023, Vol. 59 ›› Issue (21): 121-130.doi: 10.3901/JME.2023.21.121

• 特邀专栏：高性能超精密制造 • 上一篇下一篇

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化学镀NiP的凸面闪耀光栅超精密切削特性研究

彭小强^1,2,3, 李煌^1,2,3, 王跃明⁴, 关朝亮^1,2,3, 胡皓^1,2,3, 赖涛^1,2,3, 徐超^1,2,3

1. 国防科技大学智能科学学院长沙 410073;
2. 国防科技大学装备综合保障技术重点实验室长沙 410073;
3. 国防科技大学湖南省超精密加工重点实验室长沙 410073;
4. 中国科学院上海技术物理研究所上海 200083

收稿日期:2023-02-18 修回日期:2023-07-08 出版日期:2023-11-05 发布日期:2024-01-15
通讯作者: 李煌(通信作者)，男，1995年出生，博士研究生。主要研究方向为超精密加工。E-mail：li_huang6002@163.com
作者简介:彭小强，男，1977年出生，博士，研究员，博士研究生导师。主要研究方向为先进光学制造与超精密加工。E-mail：pxq2000@vip.sina.com
基金资助:
国家重点研发计划(2019YF0708903)、国家自然科学基金(52293404、51835013，52205505)、高性能复杂制造国家重点实验室开放课题基金(Kfkt2021-07)和国防科技大学科研计划(ZK22-12)资助项目。

Ultra-precision Cutting Characteristics of Convex Blazed Gratings with Electroless NiP

PENG Xiaoqiang^1,2,3, LI Huang^1,2,3, WANG Yueming⁴, GUAN Chaoliang^1,2,3, HU Hao^1,2,3, LAI Tao^1,2,3, XU Chao^1,2,3

1. College of Intelligence Science, National University of Defense Technology, Changsha 410073;
2. Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073;
3. Hunan Key Laboratory of Ultra-precision Machining Technology, National University of Defense Technology, Changsha 410073;
4. Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083

Received:2023-02-18 Revised:2023-07-08 Online:2023-11-05 Published:2024-01-15

摘要/Abstract

摘要： 凸球面闪耀光栅的切削表面质量直接影响Offner型光谱成像系统的性能。采用微晶铝6061表面化学镀NiP作为凸球面闪耀光栅的材料，首先通过材料性能表征手段研究其切削性能；其次通过模拟二维楔形工件切削过程和三维凸面闪耀光栅切削过程来确定其最小未变形切屑厚度和研究刀具倾斜角度对切屑流动和应力分布的影响规律；最后通过改变进给方向对比凸球面闪耀光栅的切削表面质量。研究结果表明化学镀NiP表现出明显的非晶特性，涂层表面和内部的元素分布均匀，车削平面的粗糙度值Ra可达0.794 nm；化学镀NiP的最小未变形切屑厚度约为30.52 nm，而刀具倾斜角度的增大是导致陡峭侧更易形成毛刺的原因；进给方向沿陡峭侧方向可改善光栅顶部毛刺，提高轮廓精度，但是对闪耀面粗糙度并没有改善，最终闪耀面粗糙度Ra均小于3 nm。

关键词: 超精密加工, 凸球面闪耀光栅, 表面质量, 非晶NiP, 切削特性

Abstract: The performance of Offner-type spectrum imaging systems is directly impacted by the cutting surface quality of convex spherical blazed gratings. Microcrystalline aluminum 6061 surfaces chemically coated with NiP are used as the convex spherical blazed grating material. Firstly, the cutting performance of the electroless NiP is studied by means of material property characterization. Secondly, the minimum undeformed chip thickness of the electroless NiP is determined by simulating the two-dimensional wedge-shaped workpiece cutting process and the three-dimensional convex blazed grating cutting process, and the influence of the tool tilt angle on the chip flow and stress distribution is studied. Finally, the cutting surface quality of convex spherical blazed grating is compared by changing the feed direction. The results show that the electroless NiP exhibits obvious amorphous characteristics, the element distribution on the surface and inside of the coating is uniform, and the roughness value Ra of the turning plane can reach 0.794 nm. The minimum undeformed chip thickness of the electroless NiP is about 30.52 nm, and the increase in the tool tilt angle is responsible for the greater susceptibility to burr formation on the steep side. The feed direction along the steep side direction can improve the top burr of the grating and improve the contour accuracy, but there is no improvement on the blaze surface roughness, and the final blaze surface roughness Ra is less than 3 nm.

Key words: ultra-precision machining, convex spherical blazed gratings, surface quality, amorphous NiP, cutting characteristics

中图分类号:

TG591

彭小强, 李煌, 王跃明, 关朝亮, 胡皓, 赖涛, 徐超. 化学镀NiP的凸面闪耀光栅超精密切削特性研究[J]. 机械工程学报, 2023, 59(21): 121-130.

PENG Xiaoqiang, LI Huang, WANG Yueming, GUAN Chaoliang, HU Hao, LAI Tao, XU Chao. Ultra-precision Cutting Characteristics of Convex Blazed Gratings with Electroless NiP[J]. Journal of Mechanical Engineering, 2023, 59(21): 121-130.

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化学镀NiP的凸面闪耀光栅超精密切削特性研究

Ultra-precision Cutting Characteristics of Convex Blazed Gratings with Electroless NiP

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