铜表面脉冲电化学射流加工的定域性和粗糙度分析

doi:10.3901/JME.2022.07.258

机械工程学报 ›› 2022, Vol. 58 ›› Issue (7): 258-266.doi: 10.3901/JME.2022.07.258

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铜表面脉冲电化学射流加工的定域性和粗糙度分析

王可, 周平, 闫英, 张超, 郭东明

大连理工大学精密与特种加工教育部重点试验室大连 116024

收稿日期:2021-05-25 修回日期:2021-09-26 出版日期:2022-05-20 发布日期:2022-05-20
通讯作者: 周平(通信作者),男,1980年出生,博士,教授,博士研究生导师。主要研究方向为超精密加工技术和表面功能结构设计与制造。E-mail:pzhou@dlut.edu.cn
作者简介:王可,男,1983年出生,博士研究生。主要研究方向为特种加工。E-mail:252441598@qq.com
基金资助:
国家自然科学基金重大(51991373)和中央高校基本科研业务费专项资金(DUT20LAB108, DUT20ZD216)资助项目。

The Localization and Roughness Analysis of Pulsed Jet Electrochemical Machining on Copper Surface

WANG Ke, ZHOU Ping, YAN Ying, ZHANG Chao, GUO Dongming

Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024

Received:2021-05-25 Revised:2021-09-26 Online:2022-05-20 Published:2022-05-20

摘要/Abstract

摘要： 电化学射流加工(Jet-ECM)是一种用于表面微细结构加工的超精密加工方法。但是，Jet-ECM加工的定域性不足，表面质量不高，无法满足高精度表面加工的需求。采用合理的电解液和脉冲电源参数可以提高电化学加工的精度和表面质量，但单纯基于试错的方法获得合理参数的难度极大。根据电化学反应和双电层的基本原理，将Jet-ECM系统等效为RC电路，用于指导脉冲Jet-ECM加工参数的选择。研究结果显示，磷酸基电解液Jet-ECM中采用脉冲电源能有效减少过切，提高铜表面加工的定域性，当加工电压为6.5 V时，采用10 kHz，50%占空比的脉冲电源相比直流电源定域性提高36%。降低加工电压和占空比也可有效提高加工定域性。但表面质量和定域性的变化趋势相反，降低加工电压和占空比不利于工件表面黏膜层的形成，降低了表面质量。本研究有助于进一步明确Jet-ECM加工中的电化学去除机理，提高无应力加工方法的加工精度，为Jet-ECM在工业中的进一步应用提供了指导。

关键词: 电化学射流加工, 脉冲电源, 双电层, 定域性, 表面质量

Abstract: Jet electrochemical machining (Jet-ECM) is a ultra-precision machining method that is widely used in microstructure processing. However, the localization and surface roughness of Jet-ECM may not meet the needs of the high-precision machining process. Appropriate electrolyte and pulse power parameters can improve the localization and surface roughness of Jet-ECM processing. However, it is very difficult to obtain the appropriate parameters based on trial and error. According to the mechanism of electrochemical reactions and electric double-layer (EDL), the Jet-ECM system is equivalent to the RC circuit which can be used to guide the selection of processing parameters. The results show that pulsed Jet-ECM has a higher localization than Jet-ECM with direct current (DC) power. When the pulse power parameters are 6.5 V, 10 kHz, 50% duty ratio, the localization increased 36% compared with the DC power. Reducing the voltage and duty ratio can effectively improve the machining localization. The surface quality is opposite to the localization, reducing the voltage and duty ratio are not conducive to the formation of the viscous film on the workpiece surface. The lack of the viscous film causes the surface roughness deterioration. This study helps to understand the mechanism in Jet-ECM of Cu, and guides the further use of Jet-ECM in industry.

Key words: jet electrochemical machining, pulse power, electric double-layer, localization, surface roughness

中图分类号:

TG156

王可, 周平, 闫英, 张超, 郭东明. 铜表面脉冲电化学射流加工的定域性和粗糙度分析[J]. 机械工程学报, 2022, 58(7): 258-266.

WANG Ke, ZHOU Ping, YAN Ying, ZHANG Chao, GUO Dongming. The Localization and Roughness Analysis of Pulsed Jet Electrochemical Machining on Copper Surface[J]. Journal of Mechanical Engineering, 2022, 58(7): 258-266.

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铜表面脉冲电化学射流加工的定域性和粗糙度分析

The Localization and Roughness Analysis of Pulsed Jet Electrochemical Machining on Copper Surface

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