关键词: ZrO2导电陶瓷, 连接机理, 连接界面, 铝, 微观结构, 阳极键合

Abstract: The technological experiment of anodic bonding is carried out between ZrO2 electrolyte ceramics and metal Al. Under certain technological parameters, and on universal electronic material testing machine, the test of shearing strength is carried out on the anodic bonding joint between ZrO2 electrolyte ceramics and metal Al. By means of the scanning electron microscope, super-light element energy spectrometer and X-ray diffraction instrument, the microstructure of joint interface, element distribution, phase structure of interface and shearing section are analyzed. Experimental results are as follows: The ZrO2 surface activating treatment has improved the ZrO2/Al joint; the high oxygen ion mobility caused by the joint interface under the condition of anodic bonding and the electrostatic field force are the major factors to promote the bonding; the multi-interface solid phase reaction of ZrO2-SiO2-Al2O3 in transition region is the main cause for the formation of bonding; the location of shear fracture of ZrO2/Al joint is on the bonding interface between ZrO2 and transition region, the initial crack area is located on the near interface of ZrO2, then extends and ends on the interface between metal Al and transition region; the morphology of fracture in the terminate area shows that the Al/transition region interface has high joint quality.

Key words: Aluminum, Anodic bonding, Joint interface, Joint mechanism, Microstructure, ZrO2 conductive ceramics