关键词: 超精密加工, 机床设备, 精密测量, 切削机理, 微结构自由曲面

Abstract: The development of ultra-precision machining technology, including ultra-precision machining equipment and the single point diamond cutting mechanism, is reviewed and summarized. Micro-engineering technology used in the production of microstructured freeform surfaces is introduced. The ultra-precision diamond cutting process for these microstructured freeform surfaces is elucidated, including single point diamond turning (SPDT), fast tool servo (FTS) machining, diamond micro chiseling (DMC), as well as ultra-precision raster milling. Challenges for measuring microstructured freeform surfaces are discussed, including contact and non-contact measuring methods. Case studies on the fabrication and characterization of some typical microstructured freeform surfaces are presented. Finally, the development of ultra-precision machining equipment in China and the future trends in the machining and measurement of microstructured freeform surfaces are discussed.

Key words: Machining equipment, Cutting mechanism, Microstructured freeform surface, Precision metrology, Ultra-precision machining