• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2019, Vol. 55 ›› Issue (7): 163-171.doi: 10.3901/JME.2019.07.163

• 数字化设计与制造 • 上一篇    下一篇

气动二维超精密伺服系统输出反馈滑模控制

田艳兵, 徐亚明, 刘庆龙, 陈霞   

  1. 青岛理工大学信息与控制工程学院 青岛 266520
  • 收稿日期:2018-04-14 修回日期:2018-09-24 出版日期:2019-04-05 发布日期:2019-04-05
  • 通讯作者: 徐亚明(通信作者),男,1994年出生,硕士研究生。主要研究方向为微纳系统控制。E-mail:xuyaming2000@163.com
  • 作者简介:田艳兵,男,1978年出生,博士,副教授,硕士研究生导师。主要研究方向为现代检测技术,微纳系统建与模控制。E-mail:70534230@qq.com;刘庆龙,男,1992年出生。主要研究方向为抗扰控制、智能控制技术应用;陈霞,女,1986年出生,博士,副教授,硕士研究生导师。主要研究方向为事件触发控制。
  • 基金资助:
    国家自然科学基金青年基金(61703225)、国家自然科学基金(61703224)和山东省高等学校科技计划(J16LN29)资助项目。

Sliding Mode Control for Pneumatic Two Dimensional Ultra-precision Servo System Based on Output Feedback

TIAN Yanbing, XU Yaming, LIU Qinglong, CHEN Xia   

  1. School of Information and Control Engineering, Qingdao University of Technology, Qingdao 266520
  • Received:2018-04-14 Revised:2018-09-24 Online:2019-04-05 Published:2019-04-05

摘要: 针对气动波纹管二维伺服系统的超高精度控制问题,提出了一种基于逐阶反馈的递归滑模控制方法。通过对三阶系统的各阶输出分别进行二次估计,设计新型逐阶状态观测器,降低了常规观测器对系统三阶状态的观测误差。通过设计逐阶滑动模态,设计递归滑模面,减少了常规动态滑模控制信号抖振问题。通过递归滑模控制器与逐阶状态观测器的结合,在提高伺服系统精度的同时改善了控制系统的动态品质。用李雅普诺夫函数理论证明了气动波纹管伺服系统所有状态全局一致最终有界。数值仿真结果表明,气动伺服系统跟踪轨迹无超调、响应速度快、精度高,实现了运动行程20 mm,稳态误差小于100nm的大行程精密控制。

关键词: 超精密, 递归滑模控制, 气动波纹管, 逐阶输出反馈

Abstract: A recursive sliding mode control method based on step-by-step feedback is proposed to solve the problem of ultra high-precision control of pneumatic bellows 2D servo system. By the two respective estimations for each order of the three-order system's output, a new order step-by-step state observer is designed, which reduces the observational error of the three-order state of the system by the conventional observer. A recursive sliding mode surface is devised by designing a step-by-step sliding mode, which avoids the chattering problem of the conventional dynamic sliding mode control signal. The combination of recursive sliding mode controller and step-by-step state observer improves the precision of the servo system while improving the dynamic quality of the control system. And the Lyapunov function theory is used to prove that all the states of the pneumatic bellows servo system are globally consistent and ultimately bounded. The numerical simulation results show that the tracking system of pneumatic servo system has no overshoot, fast response and high accuracy, which achieves a large stroke precision control with 20 mm of movement and steady error less than 100 nm.

Key words: gradual output feedback, pneumatic bellows, recursive sliding mode control, ultra-precision

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