气动二维超精密伺服系统输出反馈滑模控制
田艳兵, 徐亚明, 刘庆龙, 陈霞
Sliding Mode Control for Pneumatic Two Dimensional Ultra-precision Servo System Based on Output Feedback
TIAN Yanbing, XU Yaming, LIU Qinglong, CHEN Xia
机械工程学报
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2019, (7): 163
-171
.
DOI: 10.3901/JME.2019.07.163
