关键词: 并联机器人, 柔性铰链, 微操作

Abstract: Micro/nano manipulation is a new research direction of parallel manipulator along with the development of nanotechnology, which covers precision machinery, robotics, computer technology, automatic control, and precise measurement, etc., and has been widely used in cells or gene manipulation in biomedical field, precise surgery, microelectronic assembly, micromachining, fiber alignment, etc. The most recent work on micromanipulator research, related industrial products and applications are surveyed, then some problems existing in workspace, movement decoupling, bearing capacity, theoretical analysis, flexure hinge design, real-time calibration and measurement, new materials and actuators, etc., are pointed out and some improvements are proposed. The research will be helpful to future creative design and research development.

Key words: Flexure hinge, Micromanipulation, Parallel manipulator