关键词: 原子力显微镜;虚拟夹具;纳米操作

Abstract: Although atom force microscopy (AFM) based nanomanipulation has made a great progress during these ten years, the two problems are not primely solved as following: accurate positioning and stable maneuvering. Due to the nonlinearity of PbZrTiO3(PZT) driver and system thermal drift, the tip is difficult to be positioned relative to the maneuvered object, which will lead to the nanomanipulation failure. At the same time, the tip can only exert a so called force point on the maneuvered object, which would cause the tip slip across the object, or rotate, deform the object and obtain other unexpected results. These non-idea results would hinder the further development of nanomanipulation. As for these abovementioned problems, the nanomanipulation strategy based on the probabilistic virtual clap is proposed. This kernel idea is that on the foundation of the tip positioning, the virtual clap method is implemented through multiple intercurrent maneuvers by using single AFM tip. Simulation and experimental results represents that the proposed method can stably push the nanoparticle in the long distance, and primarily validates the feasibility of maneuvering 1D nanomaterial (tube, wire, rod) with a certain fixed pose. These works would improve the efficiency of AFM nanomanipulation.

Key words: atom force microscopy;virtual clap;nanomanipulation