• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2026, Vol. 62 ›› Issue (7): 385-395.doi: 10.3901/JME.260389

• 数字化设计与制造 • 上一篇    

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电子枪偏转电压均值估计标定方法

郭文华1,2,3, 汪科1,2,3, 郑稳1,2,3, 王玉忠1,2,3, 徐晨1,2,3, 冀千瑜1,2,3, 冯祖仁4   

  1. 1. 西安交通大学机械工程学院 西安 710049;
    2. 国家增材制造创新中心 西安 710075;
    3. 西安交通大学精密微纳制造技术全国重点实验室 西安 710049;
    4. 西安交通大学自动化学院 西安 710049
  • 收稿日期:2025-04-29 修回日期:2025-11-06 发布日期:2026-05-25
  • 作者简介:郭文华(通信作者),男,1984年出生,博士,副研究员,硕士研究生导师。主要研究方向为计算机视觉与人工智能、智能机器人和智能制造。E-mail:markguo@xjtu.edu.cn
    汪科,男,1999年出生,硕士研究生。主要研究方向为电子束选区熔化、智能制造。E-mail:xjtustuwk@stu.xjtu.edu.cn
  • 基金资助:
    国家重点研发计划资助项目(2021YFB1715600)。

Calibration Method for Estimating the Mean Deflection Voltage of Electron Gun

GUO Wenhua1,2,3, WANG Ke1,2,3, ZHENG Wen1,2,3, WANG Yuzhong1,2,3, XU Chen1,2,3, JI Qianyu1,2,3, FENG Zuren4   

  1. 1. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049;
    2. National Innovation Institute of Additive Manufacturing, Xi'an 710075;
    3. State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049;
    4. School of Automation Science & Engineering, Xi'an Jiaotong University, Xi'an 710049
  • Received:2025-04-29 Revised:2025-11-06 Published:2026-05-25

摘要: 电子枪的标定精度直接影响电子束选区熔化的成型精度。针对传统手动标定方法在精度和可靠性方面的不足,提出了一种基于圆孔均值估计模型的自动标定方法,并分析了不同圆孔半径下该模型的估计误差,计算了不同束斑直径、束斑长短轴差、束斑长轴偏角及线距条件下的电子枪偏转电压的标定误差,设计了电子枪偏转电压自动标定实验并验证了该方法的可靠性及标定精度。实验结果表明,相较于手动标定,所提出的自动标定方法使X方向扫描轨迹直线度误差从0.398 3 mm降低至0.115 4 mm,Y方向扫描轨迹直线度误差从0.581 8 mm降低至0.095 1 mm,自动标定误差总体降幅超过60%,验证了该方法较于手动标定方法,具有更高的可靠性和标定精度。

关键词: 电子枪, 圆心均值模型, 偏转电压自动标定, 标定精度

Abstract: The calibration accuracy of the electron gun directly affects the forming accuracy of the electron beam selective melting process. Aiming at the shortcomings of the traditional manual calibration method in terms of accuracy and reliability, an automatic calibration method based on the mean value estimation model of circular hole is proposed, and the estimation error of the model under different radius of circular holes is analyses. The calibration error of the deflection voltage of the electron beam gun is calculated under the conditions of different beam spot diameters, differences between the long and short axes of the beam spot, the angle of deflection of the beam spot's long axis, and the distance of the line, and the experiments on automatic calibration of the deflection voltage of the electron beam gun are designed to validate the reliability and calibration accuracy of the method. The reliability and calibration accuracy of the method are verified. The experimental results show that compared with the manual calibration, the automatic calibration method proposed reduces the mean straightness error of the X-direction scanning track from 0.3983 mm to 0.1154 mm, and the mean straightness error of the Y-direction scanning track from 0.5818 mm to 0.0951 mm, with an overall reduction of more than 60% in the automatic calibration error, which verifies that the method has a higher reliability and calibration accuracy than the manual calibration method. higher reliability and calibration accuracy than the manual calibration method.

Key words: electron gun, center-of-circle mean model, electron gun deflection voltage automatic calibration, calibration accuracy

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