丝束同轴冷阴极电子束源研制及其熔丝增材制造适用性研究

doi:10.3901/JME.2022.07.276

机械工程学报 ›› 2022, Vol. 58 ›› Issue (7): 276-283.doi: 10.3901/JME.2022.07.276

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丝束同轴冷阴极电子束源研制及其熔丝增材制造适用性研究

许海鹰^1,2, 王壮¹, 彭勇², 杨光¹, 桑兴华¹, 杨波¹

1. 中国航空制造技术研究院高能束流发生器实验室北京 100024;2. 南京理工大学材料科学与工程学院南京 210094

收稿日期:2021-04-01 修回日期:2021-11-05 出版日期:2022-04-05 发布日期:2022-05-20
通讯作者: 许海鹰(通信作者),男,1973年出生,博士,研究员,硕士研究生导师。主要研究方向为高能束源技术开发及其应用研究工作,获得40余项发明专利授权,发表论文60余篇。E-mail:xhyxhy@126.com
基金资助:
国家自然科学基金(51775527)和国防基础科研计划(JCKY2017205 A002)资助项目。

Development of Gas Discharge Electron Beam Source of Electron Beam Coaxial Wire and Fuse Additive Manufacturing Applicability

XU Haiying^1,2, WANG Zhuang¹, PENG Yong², YANG Guang¹, SANG Xinghua¹, YANG Bo¹

1. Science and Technology on Power Beam Generator Laboratory, AVIC Manufacturing Technology Institute, Beijing 100024;2. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094

Received:2021-04-01 Revised:2021-11-05 Online:2022-04-05 Published:2022-05-20

摘要/Abstract

摘要： 为了提高电子束熔丝增材制造的质量和效率，开展了丝束同轴冷阴极电子束源关键技术研究。在分析丝束同轴冷阴极电子束产生机理的基础之上，研究丝束同轴：冷阴极电子枪的结构特点；采用三级AC-DC拓扑结构、加速电源内环-外环闭环控制电路、基于气流量调节的束流闭环控制电路等，研制了丝束同轴冷阴极电子束逆变电源；基于上述技术成果研制出了丝束同轴冷阴极电子束熔丝增材制造样机。对丝束同轴冷阴极电子束源的束流形貌特征、逆变电源输出特性、熔丝成形工艺进行了检测分析，结果表明：与轴侧送丝的热阴极电子束熔丝成形技术相比，采用丝束同轴冷阴极电子束源的熔丝成形设备所制备的试样微观组织得到明显改善，为大型金属结构的熔丝成形提供技术储备。

关键词: 电子束, 熔丝增材制造, 丝束同轴, 电子枪, 逆变电源

Abstract: In order to improve the quality and efficiency of electron beam fuse additive manufacturing, the key technology of gas discharge electron beam source of electron beam coaxial wire has been studied. Based on the analysis of the generation mechanism of the gas discharge electron beam, the structure characteristics of the gas discharge electron beam gun of beam coaxial wire are studied. The inverter power supply for electron beam coaxial wire electron beam gun is developed by adopting three-stage AC-DC topology, inner loop and outer loop closed-loop control circuit of the accelerating power supply, and the beam closed-loop control circuit based on the gas flow regulation. Based on the above technical achievements, the electron beam fuse additive manufacturing equipment of electron beam coaxial wire is developed. The electron beam morphology characteristics, inverter power supply output characteristics and fuse forming process of the gas discharge electron beam source of electron beam coaxial wire are tested and analyzed. The results show that the microstructure of the sample prepared by the technology of electron beam coaxial wire is obviously improved compared with the hot cathode electron beam fuse forming technology, and it has necessary technical reserve for large-scale fuse additive manufacturing.

Key words: electron beam, fuse additive manufacturing, electron beam coaxial wire, electon beam gun, inverter power supply

中图分类号:

许海鹰, 王壮, 彭勇, 杨光, 桑兴华, 杨波. 丝束同轴冷阴极电子束源研制及其熔丝增材制造适用性研究[J]. 机械工程学报, 2022, 58(7): 276-283.

XU Haiying, WANG Zhuang, PENG Yong, YANG Guang, SANG Xinghua, YANG Bo. Development of Gas Discharge Electron Beam Source of Electron Beam Coaxial Wire and Fuse Additive Manufacturing Applicability[J]. Journal of Mechanical Engineering, 2022, 58(7): 276-283.

参考文献

[1] 李绍伟,郜庆伟,赵健,等. 电子束熔丝增材制造研究进展及展望[J]. 中国材料进展,2021,40(2):130-138. LI Shaowei,GAO Qingwei,ZHAO Jian,et al. Research progress and prospect of electron beam freeform fabrication[J]. Materials China,2021,40(2):130-138.
[2] 王钰,王凯,丁东红,等. 金属熔丝增材制造技术的研究现状与展望[J]. 电焊机,2019,49(1):69-77,123. WANG Yu,WANG Kai,DING Donghong,et al. Research status and prospect of metal wire additive manufacturing technology[J]. Electric Welding Machine,2019,49(1):69-77,123.
[3] 陈国庆,树西,张秉刚,等.国内外电子束熔丝沉积增材制造技术发展现状[J]. 焊接学报,2018,39(8):123-128. CHEN Guoqing,SHU Xi,ZHANG Binggang,etc. State-of-arts of electron beam freeform fabrication technology[J]. Transactions of the china welding institution. 2018,39(8):123-128.
[4] 付贝贝. 电子束送丝系统及增材制造工艺研究[D]. 南京:南京理工大学,2017. FU beibei. Research on the electron beam wire feeding system and the processing of material aaditive manufacture[D]. Nanjing:Nanjing University of Science and Technology,2017.
[5] 巩水利,锁红波,李怀学. 金属增材制造技术在航空领域的发展与应用[J]. 航空制造技术,2013(13):66-71. GONG Shuili,SUO Hongbo,LI Huanxue. Development and application of metal additive manufacturing technology[J]. Aeronautical Manufacturing Technolog,2013(13):66-71.
[6] 卢秉恒. 增材制造技术——现状与未来[J]. 中国机械工程,2020,31(1):19-23. LU Bengheng. The present and the future of additive manufacturing[J]. China Mechanical Engineering,2020,31(1):19-23.
[7] DENBNOVETSKY S V,MELNYK I V,MELNYK V G,et al. High voltage glow discharge electron guns and its advanced application examples in electronic industry[C]//2016 International Conference "Radio Electronics & Info Communications",September 11-16,2016,Kiev,Ukraine,1-4.
[8] DENBNOVETSKY S V,MELNYK V I,MELNYK I V. High voltage glow discharge electron sources and possibilities of its technology application[C]//International Symposium on Discharges & Electrical Insulation in Vacuum,2002:111-114.
[9] FEINAEUGLE P,MATTAUSCH G,SCHMIDT S,et al. A new generation of plasma-based electron beam sources with high power density as a novel tool for high-rate PVD[C]//Society of Vacuum Coaters 54th Annual Technical Conference Proceedings,Chicago,2011,202-209.
[10] DENBNOVETSKY S V,MELNYK V G,MELNYK I V. High voltage glow discharge electron sources and possibilities of its application in industry for realizing of different technological operations[J]. IEEE Transactions on Plasma Science,2003,31(5),987-993.
[11] BALACEANU M,DINU L,POPOVICI C. The space distribution of the electron beam in a glow discharge electron gun and its correlation with the cathode geometry[J]. Journal of Physics D:Applied Physics,1985,18,835-841.
[12] 许海鹰,左从进. 一种丝束同轴的熔丝增材制造电子枪装置:中国,201810235235.7[P].2018-03-21. XU haiying,ZUO congjin. A type of electron beam gun of electron beam coaxial wire for fuse additive manufacturing:China,201810235235.7[P].2018-03-21.
[13] 许海鹰,巩水利,桑兴华,等. 一种丝束同轴的电子束熔丝增材制造设备:中国,201910505687.7[P]. 2019-06-12. XU haiying,GONG shuili,SANG xinghua,etc. A type of fuse additive manufacturing equipment of electron beam coaxial wire:China,201910505687.7[P].2019-06-12.
[14] DENBNOVETSKIY S V,MELNYK V G,MELNYK I V,et al. Generation of electron beams in high voltage glow discharge in pulse regime[C]//Electronics and Nanotechnology. Proceedings of the XXXII International Scientific Conference ELNANO 2012. April,10-12,2012. Kiev. Ukraine,40-41.
[15] 杜秉初. 电子光学[M]. 北京:清华大学出版社,2002. Du Bingchu. Electron Optics[M]. Beijing:Press of Tsinghua University,2002.
[16] ZHANG Jiahua,YANG Yi,CAO Sheng,et al. Fine equiaxed β grains and superior tensile property in Ti- 6Al-4V alloy deposited by coaxial electron beam wire feeding additive manufacturing[J]. Acta Metallurgica Sinica,2020,33(10):1311-1320.

丝束同轴冷阴极电子束源研制及其熔丝增材制造适用性研究

Development of Gas Discharge Electron Beam Source of Electron Beam Coaxial Wire and Fuse Additive Manufacturing Applicability

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