先进光学制造技术最新进展

doi:10.3901/JME.2021.08.023

摘要/Abstract

摘要： 在激光核聚变、大型天文望远镜等国家大光学工程及各种光机电产品的驱动下，高面形精度、高表面质量、多结构型式光学组件的需求量日益增加，因此，先进光学制造技术显得尤为重要。主要综述了近十年来光学超精密加工技术的发展情况，主要包括超精密车削、磨削和抛光技术。根据光学组件的材料特性、结构特征和加工要求等，阐述了超精密加工技术的具体研究进展，包括传统技术的迭代更新与新型技术的研制开发，并针对典型应用进行举例。最后，展望了超精密光学加工技术的发展趋势。希望能为光学制造领域后续深入研究提供参考。

关键词: 光学, 超精密加工, 加工机理, 机床设备, 光学组件

Abstract: Driven by various optical and mechanical products, as well as the national major optical projects such as laser nuclear fusion and large astronomical telescopes, the demand for those optical components with high surface accuracy, high surface quality, and multiple types and sizes are increasing. Accordingly, the advanced optical manufacturing technology does become particularly critical. In this paper, the development of advanced optical manufacturing technology in recent ten years is reviewed, including ultra precision turning technology, ultra precision grinding technology and ultra precision polishing technology. Based on the material characteristics, machining requirements and structures of the optical elements, the research progress of ultra precision machining technology is specifically described, there are not only the development and renewal of traditional technology, but also the appearance of new technology, some typical applications also are given. Lastly, the development trend of ultra precision optical machining technology is prospected. It aims to provide a valuable reference for the peer researchers.

Key words: optics, ultra precision machining, machining mechanism, machine tool, optical element

中图分类号:

TH161

王振忠, 施晨淳, 张鹏飞, 杨哲, 陈熠, 郭江. 先进光学制造技术最新进展[J]. 机械工程学报, 2021, 57(8): 23-56.

WANG Zhenzhong, SHI Chenchun, ZHANG Pengfei, YANG Zhe, CHEN Yi, GUO Jiang. Recent Progress of Advanced Optical Manufacturing Technology[J]. Journal of Mechanical Engineering, 2021, 57(8): 23-56.

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