基于微机械电子技术的黏度测量传感器

doi:10.3901/JME.2021.08.013

机械工程学报 ›› 2021, Vol. 57 ›› Issue (8): 13-22.doi: 10.3901/JME.2021.08.013

• 特邀专栏：庆祝厦门大学机电工程系建系80周年：微纳制造与智能制造 • 上一篇下一篇

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基于微机械电子技术的黏度测量传感器

黄琳雅^1,2,3,4, 赵立波^1,2,3,4, 罗国希^1,2,3,4, 李支康^1,2,3,4, 吴德志⁵, 林启敬^1,2,3,4, 杨萍^1,2,3,4, 蒋庄德^1,2,3,4

1. 西安交通大学机械制造系统工程国家重点实验室西安 710049;
2. 教育部微纳制造与测试技术国际合作联合实验室西安 710049;
3. 西安交通大学(烟台)智能传感技术与系统研究院西安 710049;
4. 西安交通大学机械工程学院西安 710049;
5. 厦门大学机电工程系厦门 361005

收稿日期:2020-12-30 修回日期:2021-02-10 出版日期:2021-04-20 发布日期:2021-06-15
通讯作者: 赵立波(通信作者)，男，1978年出生，博士，教授，博士研究生导师。主要研究方向为微纳制造与先进传感技术。E-mail：libozhao@mail.xjtu.edu.cn
作者简介:黄琳雅，女，1994年出生，博士研究生。主要研究方向为微机电系统(MEMS)谐振式传感器及其在生化物质检测领域的应用。E-mail：hly2016icg@stu.xjtu.edu.cn;罗国希，男，1987年出生，博士，讲师。主要研究方向为微纳制造。E-mail：luoguoxi@mail.xjtu.edu.cn;李支康，男，1987年出生，博士，讲师。主要研究方向为电容式微加工超声换能器(CMUT)及其在生化物质检测领域的应用。E-mail：zhikangli@xjtu.edu.cn;吴德志，男，1977年出生，博士，教授，博士研究生导师。主要研究方向为微纳制造与装备、柔性可穿戴、柔性智能感知技术、软体机器人和MEMS/NEMS。E-mail：wdz@xmu.edu.cn;林启敬，男，1983年出生，博士，助理研究员。主要研究方向为微纳制造与光纤传感器。E-mail：xjjingmi@163.com;杨萍，女，1986年出生。主要研究方向为微纳米制造技术、微机电系统(MEMS)传感器技术。E-mail：ipe@mail.xjtu.edu.cn;蒋庄德，男，1955年出生，博士，教授，中国工程院院士。主要研究方向为微纳制造、先进传感技术、精密超精密加工与测试技术及装备。E-mail：zdjiang@xjtu.edu.cn
基金资助:
国家自然科学基金（51890884、51875449）、中央高校基本科研业务费（xpt012020004）和国家重大研究计划（2020YFB2009100）资助项目。

Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology

HUANG Linya^1,2,3,4, ZHAO Libo^1,2,3,4, LUO Guoxi^1,2,3,4, LI Zhikang^1,2,3,4, WU Dezhi⁵, LIN Qijing^1,2,3,4, YANG Ping^1,2,3,4, JIANG Zhuangde^1,2,3,4

1. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049;
2. International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049;
3. Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an 710049;
4. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049;
5. Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005

Received:2020-12-30 Revised:2021-02-10 Online:2021-04-20 Published:2021-06-15

摘要/Abstract

摘要： 黏度作为流体特性的基本问题，在生物化工等诸多工程中是控制生产流程、保证安全生产、进行医学诊断及科学研究的基础性热物数据，为满足各个领域高精度与高效快捷的黏度测量需求，近年来黏度测量手段已不局限于如毛细血管法、旋转法等传统意义的宏观测量方法，基于微纳米尺度的黏度测量技术已展现出其突出的发展与应用前景。微机械电子系统（Micro-electromechanical systems，MEMS）技术的蓬勃发展促使黏度测量集成化、智能化与实时性，多样化黏度测量方法不断涌现，其中谐振式黏度测量受到颇为广泛而深入的关注，并显示了瞩目的检测性能。首先回顾传统的黏度测量方法，然后再介绍了基于微机械电子技术的谐振式黏度测量方法，并分别总结了各自的特点。最后，对MEMS谐振式黏度测量方法的发展趋势进行了展望。

关键词: 流体黏度, 测量方法, 微机械电子系统, 谐振

Abstract: Viscosity has been regarded as an essential issue of fluid characteristics in a widespread field, such as biochemical engineering, since it is the basic thermal property to control the production process, ensure safe production, and conduct medical diagnosis and scientific research. In order to achieve a high-precision and high-efficiency viscosity measurement in various fields, in recent years, the viscosity measurement methods have not been limited to traditional macro measurements, such as capillary method, and rotational method. But the viscosity measurement technology under micro-nano scale has shown its outstanding development and application prospects. The rapid development of micro-electromechanical systems (MEMS) technology has promoted the viscosity measurement to integration, intelligence and real-time. Meanwhile, diversified viscosity measurement methods have continuously emerged. The resonant viscosity measurement has received extensive and in-depth attention, which has shown remarkable performance. The traditional viscosity measurement methods are briefly recalled, and then the resonant methods for viscosity determination based on micro- electromechanical system technology are introduced, with summarizing their outstanding characteristics. Finally, the development trend of viscosity measurement methods based on MEMS resonance technology is prospected.

Key words: fluid viscosity, measurement method, micro-electromechanical system, resonant vibration

中图分类号:

TP212

黄琳雅, 赵立波, 罗国希, 李支康, 吴德志, 林启敬, 杨萍, 蒋庄德. 基于微机械电子技术的黏度测量传感器[J]. 机械工程学报, 2021, 57(8): 13-22.

HUANG Linya, ZHAO Libo, LUO Guoxi, LI Zhikang, WU Dezhi, LIN Qijing, YANG Ping, JIANG Zhuangde. Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology[J]. Journal of Mechanical Engineering, 2021, 57(8): 13-22.

参考文献

[1] KHAN M F，SCHMID S，LARSEN P E，et al. Online measurement of mass density and viscosity of pL fluid samples with suspended microchannel resonator[J]. Sensors and Actuators B：Chemical，2013，185：456-461.
[2] ZHANG C，KALUVAN S，ZHANG H，et al. PMN-PT based smart sensing system for viscosity and density measurement[J]. Measurement，2017，101：15-18.
[3] 丁晓炯. 化纤行业在线黏度和实验室黏度测量数据转换研究[J]. 高科技纤维与应用，2020，45(2)：41-48. DING Xiaojiong. Study on data conversion of online viscosity and laboratory viscosity measurement in chemical fiber industry[J]. Hi-Tech Fiber and Application，2020，45(2)：41-48.
[4] 王敏杰，田慧卿，赵丹阳. 聚合物熔体微尺度剪切黏度测量方法与黏度模型[J]. 机械工程学报，2012，48(16)：21-29. WANG Minjie，TIAN Huiqing，ZHAO Danyang. Micro-scale shear viscosity testing approach and viscosity model of polymer melts[J]. Journal of Mechanical Engineering，2012，48(16)：21-29.
[5] MARQUEZ S，ALVAREZ M，FARINA S D，et al. Array of microfluidic beam resonators for density and viscosity analysis of liquids[J]. Journal of Microelectromechanical Systems，2017，26(4)：749-757.&NBSP;
[6] HUANG L，ZHAO L，LU D，et al. A Novel resonator based on in-plane mode for fluid density and viscosity measurements[C/CD]//The 14th International Conference on Nano/Micro Engineered and Molecular Systems，Thailand，Bangkok，April 11-14，2019.
[7] YILDIRIM B，SENVELI S U，GAJASINGHE R W R L，et al. Surface acoustic wave viscosity sensor with integrated microfluidics on a PCB platform[J]. IEEE Sensors Journal，2018，18(6)：2305-2312.
[8] 陈惠钊. 粘度测量[M]. 北京：中国计量出版社，2002. CHEN Huizhao. Viscosity measurement[M]. Beijing：China Metrology Publishing House，2002.
[9] 高桂丽，李大勇，石德全. 液体粘度测定方法及装置研究现状与发展趋势简述[J]. 化工自动化及仪表，2006，33(2)：65-70. GAO Guili，LI Dayong，SHI Dequan. Research situation and development trend of measurement methods and devices of liquid viscosity[J]. Chemical Automation and Instrumentation，2006，33(2)：65-70.
[10] 黄漫国，刘德峰，李欣，等. 液体黏度测量技术的发展现状与展望[J]. 测控技术，2015(4)：1-4. HUANG Manguo，LIU Defeng，LI Xin，et al. Development and trend of liquid viscosity measurement technology[J]. Measurement and Control Technology，2015(4)：1-4.
[11] 苏尔皇. 液体的粘度计算和测量[M]. 北京：国防工业出版社，1986. SU Erhuang. Calculation and measurement of liquid viscosity[M]. Beijing：National Defense Industry Press，1986.
[12] SOLGAARD O，GODIL A A，HOWE R T，et al. Optical mems：From micromirrors to complex systems[J]. Journal of Microelectromechanical Systems，2014，23(3)：517-538.
[13] ZHAO L，HUANG L，HU Y，et al. Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor[J]. Review of Scientific Instruments，2018，89(12)：125001.
[14] BALOCH S K，JONÁš A，KIRAZ A，et al. Determination of composition of ethanol-CO₂ mixtures at high pressures using frequency response of microcantilevers[J]. The Journal of Supercritical Fluids，2018，132：65-70.
[15] ZHAO L，HUANG L，LUO G，et al. An immersive resonant sensor with microcantilever for pressure measurement[J]. Sensors and Actuators A：Physical，2020，303：111686.
[16] REZAZADEH G，GHANBARI M. On the mathematical modeling of a MEMS-based sensor for simultaneous measurement of fluids viscosity and density[J]. Sensing and Imaging，2018，19：27.
[17] XU T，ZHAO L，JIANG Z，et al. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer[J]. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control，2020，67(10)：2103-2118.
[18] ZHAO L，ZHAO Y，XIA Y，et al. A novel CMUT-based resonant biochemical sensor using electrospinning technology[J]. IEEE Transactions on Industrial Electronics，2019，66(9)：7356-7365.
[19] SCHULTZ J A，HEINRICH S M，JOSSE F，et al. Lateral-mode vibration of microcantilever-based sensors in viscous fluids using timoshenko beam theory[J]. Journal of Microelectromechanical Systems，2015，24(4)：848-860.
[20] GAO R，WANG X，WANG M，et al. Nonlinear dynamics of lateral micro-resonator including viscous air damping[J]. Chinese Journal of Mechanical Engineering，2007，20(3)：75-78.
[21] PLATZ D，SCHMID U. Vibrational modes in MEMS resonators[J]. Journal of Micromechanics and Microengineering，2019，29(12)：123001.
[22] JOHNSON B N，MUTHARASAN R. Biosensing using dynamic-mode cantilever sensors：A review[J]. Biosens Bioelectron，2012，32(1)：1-18.
[23] ODEN P I，CHEN G Y，STEELE R A，et al. Viscous drag measurements utilizing microfabricated cantilevers[J]. Applied Physics Letters，1996，68(26)：3814-3816.
[24] AHMED N，NINO D F，MOY V T. Measurement of solution viscosity by atomic force microscopy[J]. Review of Scientific Instruments，2001，72(6)：2731-2734.
[25] GOODWIN A R H，DONZIER E P，VANCAUWENBERGHE O，et al. A vibrating edge supported plate，fabricated by the methods of micro electro mechanical system for the simultaneous measurement of density and viscosity：Results for methylbenzene and octane at temperatures between (323 and 423) K and pressures in the range (0.1-68) MPa[J]. Journal of Chemical &; Engineering Data，2006，51(1)：190-208.
[26] GOODWIN A R H，FITT A D，RONALDSON K A，et al. A vibrating plate fabricated by the methods of microelectromechanical system (MEMS) for the simultaneous measurement of density and viscosity：Results for argon at temperatures between 323 and 423 K at pressures up to 68 MPa[J]. International Journal of Thermophysics，2006，27(6)：1650-1676.
[27] GOODWIN A R H. A MEMS vibrating edge supported plate for the simultaneous measurement of density and viscosity：Results for argon，nitrogen，and methane at temperatures from (297 to 373) K and pressures between (1 and 62) MPa[J]. Journal of Chemical &; Engineering Data，2009，54(2)：536-541.
[28] GOODWIN A R H，JAKEWAYS C V，DE LARA M M. A MEMS vibrating edge supported plate for the simultaneous measurement of density and viscosity：Results for nitrogen，methylbenzene，water，1-propene，1，1，2，3，3，3-hexafluoro-oxidized-polymd，and polydimethylsiloxane and four certified reference materials with viscosities in the range (0.038 to 275) mPa·s and densities between (408 to 1834) kg ·m^-3 at temperatures from (313 to 373)K and pressures up to 60 MPa[J]. Journal of Chemical &; Engineering Data，2008，53(7)：1436-1443.
[29] ZHAO L，HU Y，WANG T，et al. A MEMS resonant sensor to measure fluid density and viscosity under flexural and torsional vibrating modes[J]. Sensors，2016，16(6)：1-15.
[30] HU Y，ZHAO L，WANG T，et al. The fluid viscosity measurement based on variable cross-section MEMS cantilever under torsional excitation[C]//2015 IEEE SENSORS. IEEE，2015：1-4.
[31] VAN EYSDEN C A，SADER J E. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope：Arbitrary mode order[J]. Journal of Applied Physics，2007，101(4)：044908.
[32] WANG G，TAN C，LI F. A contact resonance viscometer based on the electromechanical impedance of apiezoelectric cantilever[J]. Sensors and Actuators A：Physical，2017，267：401-408.
[33] KUCERA M，WISTRELA E，PFUSTERSCHMIED G，et al. Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode[J]. Sensors and Actuators B：Chemical，2014，200：235-244.
[34] RIESCH C，REICHEL E K，JACHIMOWICZ A，et al. A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout[J]. Journal of Micromechanics and Microengineering，2009，19(7)：075010.
[35] ABDALLAH A，REICHEL E K，VOGLHUBER- BRUNMAIER T，et al. Symmetric mechanical plate resonators for fluid sensing[J]. Sensors and Actuators A：Physical，2015，232：319-328.
[36] ABDALLAH A，REICHEL E K，HEINISCH M，et al. Symmetric plate resonators for viscosity and density measurement[J]. Procedia Engineering，2014，87：36-39.
[37] LIU Y，DIFOGGIO R，SANDERLIN K，et al. Measurement of density and viscosity of dodecane and decane with a piezoelectric tuning fork over 298-448K and 0.1-137.9 MPa[J]. Sensors and Actuators A：Physical，2011，167(2)：347-353.
[38] 廖敬骁. 基于石英音叉传感器的油品特性测试方法研究[D]. 哈尔滨：哈尔滨工业大学，2019. LIAO Jingxiao. Research on testing method of oil characteristic based on quartz tuning fork sensor[D]. Harbin：Harbin Institute of Technology，2019.
[39] GONZALEZ M，SEREN H R，HAM G，et al. Viscosity and density measurements using mechanical oscillators in oil and gas applications[J]. IEEE Transactions on Instrumentation and Measurement，2018，67(4)：804-810.
[40] XU W，APPEL J，CHAE J. Real-time monitoring of whole blood coagulation using a microfabricated contour-mode film bulk acoustic resonator[J]. Journal of Microelectromechanical Systems，2012，21(2)：302-307.
[41] WU G，XU J，ZHANG X，et al. Wafer-level vacuum-packaged high-performance AlN-on-SOI piezoelectric resonator for sub- 100-MHz oscillator applications[J]. IEEE Transactions on Industrial Electronics 2018，65(4)：3576-3584.
[42] HUI Y，GOMEZ-DIAZ J S，QIAN Z，et al. Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing[J]. Nature Communications，2016，7：11249.
[43] SCHNEIDER M，PFUSTERSCHMIED G，PATOCKA F，et al. High performance piezoelectric AlN MEMS resonators for precise sensing in liquids[J]. Electrotechnik and Informations，2020，137(3)：121-127.
[44] MANZANEQUE T，HERNANDO J，RODRíGUEZ- ARAGÓN L，et al. Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid[J]. Microsystem Technologies，2010，16(5)：837-845.
[45] TOLEDO J，RUIZ-DíEZ V，PFUSTERSCHMIED G，et al. Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation[J]. Sensors and Actuators B：Chemical，2018，254：291-298.
[46] PFUSTERSCHMIED G，KUCERA M，WISTRELA E，et al. Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids[J]. Journal of Micromechanics and Microengineering，2015，25(10)：105014.
[47] RUIZ-DíEZ V，HERNANDO-GARCíA J，MANZANEQUE T，et al. Viscous and acoustic losses in length-extensional microplate resonators in liquid media[J]. Applied Physics Letters，2015，106(8)：083510.
[48] LU X，HOU L，ZHANG L，et al. Piezoelectric-excited membrane for liquids viscosity and mass density measurement[J]. Sensors and Actuators A：Physical，2017，261：196-201.
[49] PUCHADES I，FULLER L. Design and evaluation of a MEMS bimetallic thermal actuator for viscosity measurements [C]//200817th Biennial University/ Government/Industry Micro/Nano Symposium. IEEE，2008：93-97.
[50] JAE H S，BRAND O. High Q-factor in-plane-mode resonant microsensor platform for gaseous/liquid environment[J]. Journal of Microelectromechanical Systems，2008，17(2)：483-493.
[51] BIRCHER B A，DUEMPELMANN L，RENGGLI K，et al. Real-time viscosity and mass density sensors requiring microliter sample volume based on nanomechanical resonators[J]. Analytical Chemistry，2013，85(18)：8676-8683.
[52] PATOIS R，VAIRAC P，CRETIN B. Measurement of fluid properties with a near-field acoustic sensor[J]. Applied Physics Letters，1999，75(2)：295-297.
[53] PATOIS R，VAIRAC P，CRETIN B. Near-field acoustic densimeter and viscosimeter[J]. Review of Scientific Instruments，2000，71(10)：3860-3863.
[54] CHEN D，SONG S，MA J，et al. Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring[J]. Biosensors and Bioelectronics，2017，91：465-471.
[55] EBISUI A，TAGUCHI Y，NAGASAKA Y. Novel optical viscosity sensor based on laser-induced capillary wave[J]. Proceedings of SPIE-The International Society for Optical Engineering，2008，6887：8870.

基于微机械电子技术的黏度测量传感器

Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology

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