半球谐振子几何参量对其热弹性阻尼影响研究

doi:10.3901/JME.2024.01.075

机械工程学报 ›› 2024, Vol. 60 ›› Issue (1): 75-84.doi: 10.3901/JME.2024.01.075

• 特邀专栏：高性能制造专栏 • 上一篇下一篇

扫码分享

半球谐振子几何参量对其热弹性阻尼影响研究

马传震^1,2, 刘赫男^1,2, 陈明君¹, 程健¹, 田金川¹, 周子涵¹

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 中国船舶航海保障技术实验室天津 300131

收稿日期:2023-02-20 修回日期:2023-07-18 发布日期:2024-03-15
作者简介:马传震，男，1996年出生，博士研究生。主要研究方向为超精密加工及先进制造技术。E-mail：machuanzhen@126.com
刘赫男，男，1989年出生，博士，副研究员。主要研究方向为超精密加工及先进制造技术。E-mail：liuhn@hit.edu.cn
陈明君(通信作者)，男，1971年出生，博士，教授，博士研究生导师。主要研究方向为超精密加工、先进制造技术及微纳米制造技术。E-mail：chenmj@hit.edu.cn
基金资助:
国家重点研发计划(2022YFB3403600)和中国船舶航海保障技术实验室开放基金(2022010101)资助项目。

Research on the Effect of Geometric Parameters of Hemispherical Resonator on Thermoelastic Dissipation

MA Chuanzhen^1,2, LIU Henan^1,2, CHEN Mingjun¹, CHENG Jian¹, TIAN Jinchuan¹, ZHOU Zihan¹

1. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001;
2. Laboratory of Science and Technology on Marine Navigation and Control, China State Shipbuilding Corporation, Tianjin 300131

Received:2023-02-20 Revised:2023-07-18 Published:2024-03-15

摘要/Abstract

摘要： 半球谐振子作为半球谐振陀螺仪的核心器件，其加工质量直接影响谐振子的性能参数，进而影响半球谐振陀螺仪的工作精度和使用寿命，因此非常有必要对半球谐振子的性能与其几何参量的映射关系进行研究。本研究以直径为30 mm的熔石英半球谐振子为研究对象，分析其能量损耗的形式、机理，针对谐振子几何参量对其热弹性阻尼的影响进行研究，建立半球谐振子热弹性阻尼能量损耗模型，分析谐振子结构参数、加工误差、表面质量对其能量损耗的影响规律，探究不同几何参量变化对能量损耗的敏感性，结果表明谐振子壳体结构和过渡圆角参数对其热弹性阻尼影响较大，加工误差导致的壁厚不均匀高于半径不均匀对其热弹性阻尼的影响；壳体半径由10 mm增至15 mm，Q_TED减小幅度为61%，亚表面损伤层厚度从0增至100 μm，Q_TED减小至其原值的7.5%，研究结果可为半球谐振子专用机床误差分配设计及其高性能制造研究提供参考。

关键词: 半球谐振子, 几何参量, 热弹性阻尼, 高性能制造

Abstract: Since the hemispherical resonator is core component of HRG, the processing quality of resonator directly determines performance parameters of the hemispherical resonator, which then affects the working accuracy and service life of HRG. Therefore, investigating the effect of geometric parameters of hemispherical resonator on thermoelastic dissipation is of great necessity. In this paper, the fused quartz hemispherical resonator with diameter of 30 mm is taken as the research object. By analyzing the form and mechanism of hemispherical resonator energy loss and the effect of the geometric parameters on its thermoelastic dissipation, the thermoelastic dissipation energy loss model of the hemispherical resonator is established. The effect of structural parameters, machining errors, and surface quality of the resonator on the energy loss is analyzed. What’s more, the sensitivity of different geometric parameter changes to energy loss is studied. The results show that the hemispherical shell and transition fillet parameters of the resonator have a significant impact on its thermoelastic dissipation and the effect of shell thickness nonuniformity on thermoelastic dissipation is higher than radius nonuniformity. Q_TED decreases about 61% when the shell radius increases from 10 mm to 15 mm and Q_TED reduces to 7.5% of its original value with the thickness of subsurface damage increasing from 0 to 100 μm. By summarizing what is mentioned above, references are provided for subsequent works, such as the error distribution design of the special machine tool for fused quartz hemispherical resonator and its high performance manufacturing research.

Key words: hemispherical resonator, geometric parameter, thermoelastic dissipation, high performance manufacturing

中图分类号:

TG156

马传震, 刘赫男, 陈明君, 程健, 田金川, 周子涵. 半球谐振子几何参量对其热弹性阻尼影响研究[J]. 机械工程学报, 2024, 60(1): 75-84.

MA Chuanzhen, LIU Henan, CHEN Mingjun, CHENG Jian, TIAN Jinchuan, ZHOU Zihan. Research on the Effect of Geometric Parameters of Hemispherical Resonator on Thermoelastic Dissipation[J]. Journal of Mechanical Engineering, 2024, 60(1): 75-84.

参考文献

[1] DELHAYE F. HRG by SAFRAN:The game-changing technology[C]//IEEE International Symposium on Inertial Sensors and Systems(INERTIAL). New York:IEEE,2018:173-176.
[2] ROZELLE D M. The hemispherical resonator gyro:From wineglass to the planets[J]. Advances in the Astronautical Sciences,2009,134:1157-1178.
[3] 郭东明,孙玉文,贾振元. 高性能精密制造方法及其研究进展[J]. 机械工程学报,2014,50(11):119-134. GUO Dongming,SUN Yuwen,JIA Zhenyuan. Method and research progress of high performance manufacturing[J]. Journal of Mechanical Engineering,2014,50(11):119-134.
[4] 郭东明. 高性能精密制造[J]. 中国机械工程,2018,29(7):757-765. GUO Dongming. High-performance precision manufacturing[J]. China Mechanical Engineering,2018,29(7):757-765.
[5] 郭东明. 高性能制造[J]. 机械工程学报,2022,58(21):225-242. GUO Dongming. High performance manufacturing[J]. Journal of Mechanical Engineering,2022,58(21):225-242.
[6] BERNSTEIN J J,BANCU M G,BAUER J M,et al. High Q diamond hemispherical resonators:Fabrication and energy loss mechanisms[J]. Journal of Micromechanics and Microengineering,2015,25(8):085006.
[7] DARVISHIAN A,NAGOURNEY T,CHO J Y,et al. Thermoelastic dissipation in micromachined birdbath shell resonators[J]. Journal of Microelectromechanical Systems,2017,26(4):758-772.
[8] DUWEL A,CANDLER R N,KENNY T W,et al. Engineering MEMS resonators with low thermoelastic damping[J]. Journal of Microelectromechanical Systems,2006,15(6):1437-1445.
[9] DZHASHITOV V E,PANKRATOV V M. Mathematical models of the thermoelastic stress-strain state,temperature,and technological errors of a wave solid-state sensor of inertial informations[J]. Journal of Machinery Manufacture and Reliability,2010,39(3):248-255.
[10] DARVISHIAN A,SHIARI B,CHO J Y,et al. Investigation of thermoelastic loss mechanism in shell resonators[C]//Proceedings of ASME 2014 International Mechanical Engineering Congress and Exposition. New York:American Society of Mechanical Engineers,2014:39331.
[11] AHAMED M J,SENKAL D,SHKEL A M. Effect of annealing on mechanical quality factor of fused quartz hemispherical resonator[C]//IEEE International Symposium on Inertial Sensors and Systems(ISISS). New York:IEEE,2014:59-62.
[12] SORENSON L,SHAO P,AYAZI F. Bulk and surface thermoelastic dissipation in micro-hemispherical shell resonators[J]. Journal of Microelectromechanical Systems,2015,24(2):486-502.
[13] XI X,WU X,WU Y,et al. Modeling and analysis of mechanical quality factor of the resonator for cylinder vibratory gyroscope[J]. Chinese Journal of Mechanical Engineering,2017,30(1):180-189.
[14] 魏振楠. 速率积分半球谐振陀螺建模、测试及误差补偿技术[D]. 哈尔滨:哈尔滨工业大学,2022. WEI Zhennan. Modeling,testing and error compensation technology for rate integrating hemispherical resonator gyro[D]. Harbin:Harbin Institute of Technology,2022.
[15] MENG L,ZHOU P,YAN Y,et al. A new manufacturing methodology under limited machining capabilities and application to high-performance hemispherical resonator[J]. Machines,2022,10(12):1173.
[16] WONG S J,FOX C,MCWILLIAM S. Thermoelastic damping of the in-plane vibration of thin silicon rings[J]. Journal of Sound and Vibration,2006,293(1-2):266-285.
[17] WANG T,WU C,LIU H,et al. Configuration design and accuracy analysis of special grinding machine for thin-walled small concave surfaces[J]. Precision Engineering,2019,56:293-302.
[18] 王廷章. 半球薄壁复杂构件球头砂轮超精密磨削关键技术研究[D]. 哈尔滨:哈尔滨工业大学,2020. WANG Tingzhang. Research on key technology of ultra-precision grinding hemisphere thin-walled complex component with ball-end grinding wheel[D]. Harbin:Harbin Institute of Technology,2020.
[19] WANG T,CHENG J,LIU H,et al. Ultra-precision grinding machine design and application in grinding the thin-walled complex component with small ball-end diamond wheel[J]. International Journal of Advanced Manufacturing Technology,2019,101(5-8):2097-2110.
[20] 刘赫男. 半球谐振子磁流变抛光的关键技术研究[D]. 哈尔滨:哈尔滨工业大学,2019. LIU Henan. Research on key technologies of magnetorheological finishing of hemispherical resonator[D]. Harbin:Harbin Institute of Technology,2019.
[21] CHEN J,FANG Q,LI P. Effect of grinding wheel spindle vibration on surface roughness and subsurface damage in brittle material grinding[J]. International Journal of Machine Tools and Manufacture,2015,91:12-23.
[22] XIAO H,CHEN Z,WANG H,et al. Effect of grinding parameters on surface roughness and subsurface damage and their evaluation in fused silica[J]. Optics Express,2018,26(4):4638-4655.
[23] 程健,牛玉宝,王景贺,等. 熔石英材料特性分析及实验研究[J]. 光学技术,2018,44(6):651-656. CHENG Jian,NIU Yubao,WANG Jinghe,et al. Analysis and experimental research on fused silica material characteristics[J]. Optical Technique,2018,44(6):651-656.
[24] 王悦昶,刘莹,李鸿举. 粗糙表面仿真方法综述[J]. 机械工程学报,2022,58(19):148-165. WANG Yuechang,LIU Ying,LI Hongju. A review of rough surface simulation methods[J]. Journal of Mechanical Engineering,2022,58(19):148-165.
[25] CHU J N,LIU X,LIU C L,et al. Fundamental investigation of subsurface damage on the quality factor of hemispherical fused silica shell resonator[J]. Sensors and Actuators:A. Physical,2022,335:113365.
[26] 张扬,张维刚,马桃,等. 基于全局敏感性分析和动态代理模型的复杂非线性系统优化设计方法[J]. 机械工程学报,2015,51(4):126-131. ZHANG Yang,ZHANG Weigang,MA Tao,et al. Optimization design method of non-linear complex system based on global sensitivity analysis and dynamic metamodel[J]. Journal of Mechanical Engineering,2015,51(4):126-131.
[27] 郑似玉,滕金芳,羌晓青. 叶片加工超差对高压压气机性能影响和敏感性分析[J]. 机械工程学报,2018,54(2):216-224. ZHENG Siyu,TENG Jinfang,QIANG Xiaoqing. Sensitivity analysis of manufacturing variability on high-pressure compressor performance[J]. Journal of Mechanical Engineering,2018,54(2):216-224.

半球谐振子几何参量对其热弹性阻尼影响研究

Research on the Effect of Geometric Parameters of Hemispherical Resonator on Thermoelastic Dissipation

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 5

编辑推荐

Metrics

本文评价

[1]	马传震, 刘赫男, 陈明君, 田金川, 周子涵, 孙建刚, 秦彪. 半球谐振子关键性能及制造工艺研究新进展[J]. 机械工程学报, 2024, 60(3): 354-372.
[2]	王润琼, 宋清华, 彭业振, 刘战强. 基于特征自适应融合和集成学习的高性能铣削刀具状态监测[J]. 机械工程学报, 2024, 60(1): 149-158.
[3]	宋学官, 李昆鹏, 胡正国, 郭东明. 高性能制造：设计与制造的协同机制[J]. 机械工程学报, 2024, 60(1): 2-12.
[4]	郭东明. 高性能制造[J]. 机械工程学报, 2022, 58(21): 225-242.
[5]	雷明凯, 郭东明. 高性能表面层制造：基于可控表面完整性的精密制造^*[J]. 机械工程学报, 2016, 52(17): 187-197.