关键词: 激励, 检测, 微机械, 谐振, 谐振器, 压力传感器

Abstract: Silicon micromachined resonant pressure sensor is the optimum selection of pressure monitoring in aerospace, industrial process controlling and other precision measurement fields, for its high accuracy and extremely long-term stability. A review on 30 years of range silicon micromachined resonant pressure sensor development is presented, especially on the structures of various sensor chips using different excitation and detection mechanisms. Meanwhile, the classification and operating principle of silicon micromachined resonant pressure sensor are introduced, and the research history, the major research institutions, the study status and the latest research achievements are described in detail, based on two main types of sensor chip structures：Composite structure of diaphragm and resonator, and vibrating diaphragm structure. Then comparisons are made in sensor chip structures, excitation mechanisms and detection mechanisms. Prospects for the foreseeable future of silicon micromachined resonant pressure sensor is proposed.

Key words: Detection, Excitation, Micromachining, Pressure sensor, Resonance, Resonator