基于离子束刻蚀的未镀膜熔融石英微半球谐振结构频率裂解修调技术研究

doi:10.3901/JME.260248

摘要/Abstract

摘要： 熔融石英微半球谐振陀螺具有品质因数高、抗冲击性能好、体积尺寸小等显著优点，是目前精度最高的微机电陀螺之一。低损伤高精度的机械修调是微半球谐振陀螺性能提升的关键技术之一。由于微半球谐振结构初始频差大，机械修调会产生大量粉尘，需要在镀膜前进行初步修调便于后续清洗。针对壳面质量刚度异常敏感和特定区域能实现质量刚度解耦的特点，提出了一种基于离子束刻蚀的未镀膜微半球谐振结构频率裂解修调技术，实现低损伤机械修调。通过理论和仿真分析了壳面修调模型对谐振结构频率裂解的影响规律，确定了修调中心区域的位置和修调尺寸的大小。针对未镀膜微半球谐振结构频率裂解的检测，建立了平面叉指电极测试系统，准确辨识出谐振结构频率裂解大小及刚性轴方向。最后，设计了离子束修调实验，对所提出的方案进行实验验证，将未镀膜微半球谐振结构频率裂解降低至100 mHz以下，有效提升了微半球谐振陀螺性能。

关键词: 微半球谐振结构, 机械修调, 有限元仿真, 离子束修调

Abstract: Micro hemispherical resonator gyroscope (μHRG) is one of the most high-precision micro electromechanical system (MEMS) gyroscope at present, which has the significant advantages of high quality factor, good impact resistance and small size. Low-damage and high-precision mechanical tuning is one of the key technologies to improve the performance of micro-hemispherical resonant gyroscopes. Due to the large initial frequency split of the μHRG, mechanical tuning will produce a lot of dust, and preliminary mechanical tuning is needed before coating to facilitate subsequent cleaning. In view of the abnormal sensitivity to shell surface mass stiffness and decoupling of mass stiffness in specific regions of shell surface, a mechanical tuning method based on ion beam etching of the shell surface of the micro hemisphere resonantor is proposed. The problem of large frequency split of the uncoated resonator is solved. The influence of the shell surface tuning model on the frequency split of the resonant structure is analyzed by theory and simulation, and the position of the tuning center area and the tuning are determined. In addition, for the detection of the frequency split of the uncoated MHR, a planar interdigitated electrode test system is established to accurately identify the frequency split size and stiffness axis direction of the resonantor. Finally, ion beam trimming experiment is designed to verify the proposed method. The frequency split of a uncoated micro-hemispherical resonator is reduced to less than 100 mHz, considerably improves the gyroscope’s performance.

Key words: micro hemispherical resonantor, mechanical tuning, finite element simulation, ion beam trimming

中图分类号:

V241

李家程, 卢坤, 席翔, 石岩, 孙江坤, 吴学忠, 肖定邦. 基于离子束刻蚀的未镀膜熔融石英微半球谐振结构频率裂解修调技术研究[J]. 机械工程学报, 2026, 62(5): 319-328.

LI Jiacheng, LU Kun, XI Xiang, SHI Yan, SUN Jiangkun, WU Xuezhong, XIAO Dingbang. The Frequency Trimming Research on Uncoated Micro-hemispherical Resonantor Using Ion Beam[J]. Journal of Mechanical Engineering, 2026, 62(5): 319-328.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260248

http://www.cjmenet.com.cn/CN/Y2026/V62/I5/319

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