基于离子束刻蚀的未镀膜熔融石英微半球谐振结构频率裂解修调技术研究
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The Frequency Trimming Research on Uncoated Micro-hemispherical Resonantor Using Ion Beam
LI Jiacheng, LU Kun, XI Xiang, SHI Yan, SUN Jiangkun, WU Xuezhong, XIAO Dingbang
机械工程学报
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2026, (5): 319
-328
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DOI: 10.3901/JME.260248
