高灵敏度、大带宽全石英谐振MEMS加速度计研究

doi:10.3901/JME.260505

摘要/Abstract

摘要： 设计一款新型全石英谐振MEMS加速度计结构。对加速度计谐振梁的谐振频率与灵敏度进行了数学建模，有限元分析得到了初始结构尺寸的灵敏度、固有频率，数值仿真与数学解析计算结果的相对误差小于4.5%，验证数学解析与数值模型的有效性。根据灵敏度解析数学模型，通过对敏感结构受力分析，得到质量摆的厚度、挠性支撑的厚度与宽度对加速度计的灵敏度影响较大。通过有限元仿真得到了质量摆的最优厚度；质量摆厚度一定，挠性支撑尺寸变化时，灵敏度与固有频率反比例变化，基于仿真-图谱-拟合法，得到了高灵敏度、高固有频率的挠性支撑结构尺寸。试验标定得到加速度计的灵敏度为77.21 Hz/g，IA输入轴固有频率1 085 Hz，OA输出轴固有频率910 Hz，PA摆轴固有频率840 Hz，量程达到80 g，研制的全石英谐振加速度计同时具有高灵敏度、大带宽、大量程，提高了石英谐振式加速度计的工程应用能力。

关键词: 结构, 数值仿真, 高灵敏度, 大带宽, 大量程

Abstract: A novel all-quartz resonant MEMS accelerometer structure has been designed. A mathematical modeling study is performed to analyze the sensitivity of the accelerometer and the resonant frequency of the resonant beam. Finite element analysis is used to obtain the sensitivity and natural frequency of the initial structural dimensions. The relative error between numerical simulation and mathematical analytical results is less than 4.5%, validating the effectiveness of both the mathematical analysis and numerical model. Based on the analytical mathematical model of sensitivity, through force analysis of the sensitive structure, it is found that the thickness of the proof mass and the thickness and width of the flexural support have a significant impact on the sensitivity of the accelerometer. Finite element simulation is employed to determine the optimal thickness of the proof mass. When the thickness of the proof mass is fixed and the dimensions of the flexural support vary, sensitivity and natural frequency change inversely. Using a simulation-mapping-fitting method, the dimensions of the flexural support structure with high sensitivity and high natural frequency were obtained. Experimental calibration showed that the sensitivity of the accelerometer is 77.21 Hz/g, with natural frequencies of 1 085 Hz for the IA (input axis), 910 Hz for the OA (output axis), and 840 Hz for the PA (pendulum axis). The measuring range reaches 80 g. The developed all-quartz resonant accelerometer simultaneously exhibits high sensitivity, large bandwidth, and high measuring range, enhancing the engineering applicability of quartz resonant accelerometers.

Key words: structure, numerical simulation, high sensitivity, large bandwidth, high measuring range

中图分类号:

张宇航, 赵玉龙, 李村, 薛闳. 高灵敏度、大带宽全石英谐振MEMS加速度计研究[J]. 机械工程学报, 2026, 62(10): 375-388.

ZHANG Yuhang, ZHAO Yulong, LI Cun, XUE Hong. Study for MEMS Accelerometer of Quartz Resonant with High Sensitivity and Large Bandwidth[J]. Journal of Mechanical Engineering, 2026, 62(10): 375-388.

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