关键词: 薄膜热电偶, 磁控溅射, 化爆材料, 离子镀, 切削温度

Abstract: In allusion to the features of cutting chemical explosive material, a new type of fast response temperature sensor—NiCr/NiSi thin film thermocouple is developed, which inte-grates both cutting and temperature measuring functions. The NiCr/NiSi thin-films are plated directly inside a high speed steel cutter. A SiO2 insulating layer between the thin-films and high speed steel substrate is deposited by Microwave ECR Plasma source enhanced reactive RF magnetron sputtering for the first time. Static and dynamic calibrations for the thin-film thermocouple are carried out. It is concluded that the temperature sensor has good linearity and thermal stability within the temperature range and can response very fast. Its response time is only 0.8 ms. The NiCr/NiSi thin-film and insulating film are deposited onto the cutter strong enough. The thin-film thermocouple sensor is being used in China Academy of Engineering Physical, which provides efficient and safe production for war industry enterprise.

Key words: Chemical explosive material, Cutting temperature, Ion plating, Magnetron sputtering, Thin film thermocouple