• CN:11-2187/TH
  • ISSN:0577-6686

›› 2006, Vol. 42 ›› Issue (11): 103-108.

• 论文 • 上一篇    下一篇

内箝位型压电精密步进旋转驱动器

刘建芳;杨志刚;赵宏伟;程光明;刘国嵩   

  1. 吉林大学机械科学与工程学院
  • 发布日期:2006-11-15

PRECISION PZT ROTARY STEP ACTUATOR WITH INNER ANCHOR/LOOSEN

LIU Jianfang;YANG Zhigang;ZHAO Hongwei;CHENG Guangming;LIU Guosong   

  1. College of Mechanical Science and Engineering, Jilin University
  • Published:2006-11-15

摘要: 提出一种新型的压电精密步进旋转驱动器。该驱动器以仿生运动的原理,以压电陶瓷叠堆为动力源,采用定子内侧箝位的方式和薄壁柔性铰链微变形结构,提高该驱动器箝位的稳定性和步进旋转的稳定性。通过静力学有限元分析和动力学分析,较深入地研究了该驱动器的运动特性,并对驱动器旋转分辨率、旋转速度、驱动转矩等方面进行试验研究。研制的内箝位型压电精密步进旋转驱动器能够实现高频率(40 Hz),较高速度(325 μrad /s),大行程(大于360°),高分辨率(1 μrad),较大驱动力矩(30 N·cm)等特点,有效提高了压电精密步进旋转驱动器的驱动性能。该驱动器在精密运动、微操作、光学工程以及精密定位等精密工程中具有广阔的应用前景。

关键词: 薄壁柔性铰链, 定子内侧箝位, 分辨率, 压电陶瓷叠堆, 有限元分析

Abstract: A new precision rotary piezoelectric PZT actuator is proposed to improve its drive capabilities. The actuator is based on the PZT technology. The actuator adopts the principle of bionics and works with a new method of stator inner anchor/loosen and a distortion structure of thin shelf flexible hinge. This structure improves the stability in the process of its anchor/loosen and step rotary. Its characteristic is analyzed from the finite element analyses. From the experiment, the resolution, rotary speed, rotary torque, etc. is measured. It shows that the new rotary PZT actuator can works with high frequency (40 Hz), high speed (325 μrad/s), large travel (360°), high resolution (1 μrad) and high torque (30 N·cm). The actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some mi-cro-manipulation field.

Key words: Finite element analyses, Piezoelectric element, Resolution, Stator inner anchoring/loosen, Thin shelf flexible hinge

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