关键词: 电解加工, 脉冲电源, 微结构, 微细加工, 微小孔

Abstract: Electrolytic micromachining (EMM) offers many special advantages, and it is a promising technique in micromachining domain. Experimental setup of EMM which is in fact a multifunction machine tool has been developed successfully. Micro tool electrode can also be fabricated by wire electro discharge grinding (WEDG) on the same machine tool. This setup includes feed mechanism, micro electrode fabrication mechanism, high frequency pulsed power supply, short circuit detection and some accessory devices. Pulse power supply is a key technology of EMM. A high frequency pulsed power sup-ply of EMM which suits EMM well has been designed. Sets of the experiments of micro-hole drilling and microstructure mill-ing with micro tool electrode rotating at great high speed by EMM at the multifunction micromachining setup have been carried out and the satisfactory process results of micro-hole and microstructure with high precision machined by EMM are obtained on condition that machining voltage and concentration of passivity electrolyte are very low. The experimental results and analysis on EMM will open up more application possibili-ties for EMM.

Key words: Micro hole, Electrolytic machining, Micromachining, Microstructure, Pulse power supply