• CN:11-2187/TH
  • ISSN:0577-6686

›› 2002, Vol. 38 ›› Issue (6): 47-50.

• 论文 • 上一篇    下一篇

光学材料无磨料低温抛光的试验研究

刘向阳;王立江;高春甫;吴校生;刘巍娜   

  1. 吉林大学机械科学与工程学院
  • 发布日期:2002-06-15

EXPERIMENTAL STUDY ON CRYOGENIC POLISHING OPTICAL MATERIAL WITHOUT ABRASIVE

Liu Xiangyang;Wang Lijiang;Gao Chunfu;Wu Xiaosheng;Liu Weina   

  1. Jilin University
  • Published:2002-06-15

摘要: 将无磨料抛光与低温抛光结合起来,首次提出一种可获得原子级超光滑表面的新方法——无磨料低温抛光。这种新工艺可使光学材料获得Ra<1nm的原子级超光滑表面,通过大量的试验,系统研究了抛光盘水质、抛光前修盘时间、抛光压力和偏心等对已加工表面粗糙度的影响规律。结果表明,这种抛光工艺能获得原子级的超光滑表面。

关键词: 超光滑表面, 低温抛光, 光学材料, 无磨料

Abstract: A process of cryogenic polishing without abrasive is proposed ,which combines abrasiveless polishing and cryogenic polishing. This new process gains super-smooth surface on optical material with angstrom dimension (Ra<1 nm). By various experiments , the effects of water quality of polishing disk , time of modifying ice disk, polishing pressure and eccentricity on surface roughness are studied. Results show that this process can reach surface roughness with angstrom dimension.

Key words: Cryogenic polishing, Optical material, Supersmooth surface, Without abrasive

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