关键词: 薄膜, 磁控溅射, 氟化类金刚石, 类金刚石

Abstract: Pure DLC（Diamond like carbon a-C:H）and fluorinated DLC (a-C:H:F ) are deposited using unbalanced magnetron sputtering method. Mechanical properties of the different DLC are tested using ST2200 scratch test equipment and the mechanism of the scratch test is studied. The results show that the damage forms of the DLC surface during the test processing are cracking, chips, indenter scratch in the surface and the total sapling of the surface layer by the increasing of the test load. Cracking resistance, anti-chipping and scratch in properties depend on the mechanical characteristic of the DLC layer while the sapling resistance of the surface layer is related to the adhesion property between the surface layer and substrate. Derreasement of the friction coefficient of the DLC is beneficial for increasing the anti-scratch ability of the DLC layer. Comparing with DLC, fluorinated DLC has lower friction in the same scratch load, higher anti-cracking strength and higher adhesion strength.

Key words: Diamond like carbon, Fluorinated diamond like carbon, Magnetron sputtering, Thin film