管状工件内表面铬基薄膜沉积技术研究进展

doi:10.3901/JME.2023.24.056

摘要/Abstract

摘要： 管状工件在工业领域应用广泛，但由于服役环境恶劣等原因导致内表面磨损、腐蚀和氧化，工件常常达不到设计寿命而过早失效，因此需要对其内表面进行镀膜以强化其使用性能。铬基材料具有硬度高、耐高温、耐腐蚀等优势，是强化工件表面性能常用的涂层材料。针对国内外对管状工件内表面进行镀铬基薄膜的不同工艺，包括电镀法、溶胶-凝胶法、物理气相沉积法、热喷涂和化学气相沉积法等进行了综述，系统介绍了几类方法的特点及其在管状工件内表面铬基薄膜沉积的应用及技术问题。首先，对电镀法和溶胶-凝胶法进行了详细说明；其次，物理气相沉积法着重介绍了溅射镀膜与多弧离子镀方法，热喷涂从电爆喷涂、热等离子体喷涂入手分析，化学气相沉积法着重阐述了热反应气相沉积和等离子体辅助化学气相沉积方法；最后，重点从现有技术下工艺所能达到的长径比及其薄膜均匀性对几类方法进行了总结与展望。通过全面综述不同工艺的特点及应用，为管状工件内表面铬基薄膜沉积提供了技术支持和参考依据。

关键词: 管状工件, 内表面, 铬基薄膜沉积, 物理气相沉积, 化学气相沉积

Abstract: Tubular components are widely used in industrial and national defense industries. However, due to harsh operating environments, the inner surface of the component often experiences wear, corrosion, and oxidation, resulting in premature failure before reaching the design life. Therefore, it is necessary to coat the inner surface with a chromium-based film to enhance its wear resistance, corrosion resistance, and oxidation resistance. Chromium-based materials have the advantages of high hardness, high temperature resistance, and corrosion resistance, and are commonly used coating materials to improve the surface properties of components. A comprehensive review of various techniques for depositing chromium-based films on the inner surface of tubular components is provided, including electroplating, sol-gel, physical vapor deposition, thermal spraying, and chemical vapor deposition. The characteristics of each method and their applications and technical issues in depositing chromium-based films on the inner surface of tubular components are systematically introduced. First, electroplating and sol-gel methods are described in detail. Second, physical vapor deposition method focuses on sputter coating and multi-arc ion plating. Thermal spraying is analyzed from the perspectives of electric arc spraying and thermal plasma spraying. Chemical vapor deposition method emphasizes on hot reaction gas phase deposition and plasma-assisted chemical vapor deposition. Finally, the achievable aspect ratio and film uniformity of each method under current technology are summarized and prospects are discussed. The characteristics and applications of different techniques are comprehensively reviewed, providing technical support and reference for the deposition of chromium-based films on the inner surface of tubular components.

Key words: tubular workpiece, inner surface, chromium-based film deposition, physical vapor deposition, chemical vapor deposition

中图分类号:

TG156
TB114

王瑞雪, 王慧妍, 薛爽, 贺建芸, 陈茜, 张庆, 谢鹏程, 杨卫民, 谭俊. 管状工件内表面铬基薄膜沉积技术研究进展[J]. 机械工程学报, 2023, 59(24): 56-71.

WANG Ruixue, WANG Huiyan, XUE Shuang, HE Jianyun, CHEN Xi, ZHANG Qing, XIE Pengcheng, YANG Weimin, TAN Jun. Research Progress of Chromium-based Thin Film Deposition Technology on Inner Surface of Tubular Workpieces[J]. Journal of Mechanical Engineering, 2023, 59(24): 56-71.

参考文献

[1] 倪广地,黄贤滨,张艳玲. 原油输送管道内腐蚀原因分析[J]. 材料保护,2017,50(10):89-92. NI Guangdi,HUANG Xianbin,ZHANG Yanling. Analysis on internal corrosion of crude oil pipeline[J]. Materials Protection,2017,50(10):89-92.
[2] 欧阳青. 火炮身管烧蚀磨损与寿命问题研究[D]. 南京:南京理工大学,2013. OUYANG Qing. Study on ablation wear and life of gun barrel[D]. Nanjing:Nanjing University of Science & Technology,2013.
[3] 熊道陵,李金辉,李英. 废铬资源再利用技术[M]. 北京:冶金工业出版社,2012. XIONG Daoling,LI Jinhui,LI Ying. Recycling technology of waste chromium resources[M]. Beijing:Metallurgical Industry Press,2012.
[4] 蔡飞,高营,蔡习军,等. 硬质合金刀具高能离子源增强多弧镀AlCrTiSiN梯度涂层制备及性能研究[J]. 机械工程学报,2019,55(19):213-220. CAI Fei,GAO Ying,CAI Xijun,et al. High-energy ion source enhancement of cemented carbide tools Preparation and performance of AlCrTiSiN gradient coating by strong multi-arc plating[J]. Journal of Mechanical Engineering,2019,55(19):213-220.
[5] 张世宏,毛陶杰,方炜,等. 高能离子源清洗对AlCrN刀具涂层结构及性能的影响[J]. 机械工程学报,2017,53(24):34-41. ZHANG Shihong,MAO Taojie,FANG Wei,et al. Effects of high-energy ion source cleaning technology on the microstructure and mechanical properties of AlCrN coatings[J]. Journal of Mechanical Engineering,2017,53(24):34-41
[6] ZHANG Y,LI J,HUANG J,et al. Mechanical and tribological properties of plasma-sprayed Cr₃C₂-NiCr,WC-Co,and Cr₂O₃ coatings[J]. Journal of Thermal Spray Technology,1998,7(2):242-246.
[7] 刘喆,冷科,郭朝乾,等. 细长管内壁涂层技术进展及应用现状[J]. 材料研究与应用,2021,15(3):262-275. LIU Zhe,LENG Ke,GUO Zhaoqian,et al. Progress of coating technology and application status of the inner wall of slender tubes[J]. Materials Research and Applications,2021,15(3):262-275.
[8] 张瑞莹,付晓刚,阮章顺,等. 管内壁制备金属涂层研究进展[J]. 科技风,2023,529(17):149-151. ZHANG Ruiying,FU Xiaogang,RUAN Zhangshun,et al. Progress in the preparation of metal coatings on the inner wall of tubes[J]. Technological Trend,2023,529(17):149-151.
[9] Kratochvilova I,Celbova L,Ashcheulov P,et al. Polycrystalline diamond and magnetron sputtered chromium as a double coating for accident-tolerant nuclear fuel tubes[J]. Journal of Nuclear Materials,2023,578:154333.
[10] 杜宇. 铝铁镍青铜衬套镀硬铬工艺研究及其应用[J]. 世界有色金属,2020,97(18):205-206. DU Yu. Research and application of hard chromium plating on Al Fe Ni bronze bushing[J]. World Nonferrous Metals,2020,97(18):205-206.
[11] 冯辉,袁萍萍,张琳,等. 脉冲电镀铬的研究现状与展望[J]. 电镀与精饰,2010,32(1):20-23. FENG Hui,YUAN Pingping,ZHANG Lin,et al. Research status and future prospects of chromium pulse electroplating[J]. Plating and Finishing,2010,32(1):20-23.
[12] LIM D,KU B,SEO D,et al. Pulse-reverse electroplating of chromium from Sargent baths:Influence of anodic time on physical and electrochemical properties of electroplated Cr[J]. International Journal of Refractory Metals & Hard Materials,2020,89(1):105213-105234.
[13] 李曼,邹松华,王帅东,等. 脉冲频率对脉冲电镀铬层性能的影响[J]. 材料保护,2019,52(8):127-129,148. LI Man,ZOU Songhua,WANG Shuaidong,et al. Influence of pulse frequency on the performance of pulse electroplating chrome coating[J]. Materials Protection,2019,52(8):127-129,148.
[14] 李姣. 化学沉淀法处理电镀废水的实验研究[D]. 长沙:湖南大学,2011. LI Jiao. The research of electroplating wastewater treated by chemical precipitation[D]. Changsha:Hunan University,2011.
[15] 屠振密,郑剑,李宁,等. 三价铬电镀铬现状及发展趋势[J]. 表面技术,2007,21(5):59-63,87. TU Zhenmi,ZHENG Jian,LI Ning,et al. Recent development and tendency of trivalent chromium plating[J]. Surface Technology,2007,21(5):59-63,87.
[16] BRIDE J E. Preparing plating bath containing chromiccompound:U. S. Patent 3706636[P]. 1972-12-19.
[17] 毛祖国,管勇,丁运虎,等. 氯化物体系三价铬电镀工艺研究[J]. 制造技术与机床,2008,21(4):87-91. MAO Zuguo,GUAN Yong,DING Yunhu,et al. Study on trivalent chromium electroplating process in chloride system[J]. Manufacturing Technology & Machine Tool,2008,21(4):87-91.
[18] 吴慧敏,康健强,左正忠,等. 全硫酸盐体系三价铬电镀铬的研究[J]. 武汉大学学报(理学版),2004,12(2):187-191. WU Huimin,KANG Jianqiang,ZUO Zhengzhong,et al. Study of electroplating with thrivalent chromium in sulfate system[J]. Journal of Wuhan University(Natural Science Edition),2004,12(2):187-191.
[19] 霍玮,亢淑梅,徐美玲,等. 环保型三价铬电镀铬工艺研究[J]. 宽厚板,2020,26(3):9-14. HUO Wei,KANG Shumei,XU Meiling,et al. Study on environmental protection trivalent chromium electroplating process[J]. Wide and Thick Plate,2020,26(3):9-14.
[20] 闫慧,黄帅帅,杨防祖,等. 硫酸盐体系三价铬沉积机理及镀层表征[J]. 电化学,2018,24(1):20-27. YAN Hui,HUANG Shuaishuai,YANG Fangzu,et al. Mechanism of trivalent chromium deposition in sulfate system and characterization of plating layers[J]. Electrochemistry,2018,24(1):20-27.
[21] 赵坤,孙化松,李永彦,等. 硫酸盐电镀三价铬镀层性能研究[J]. 表面技术,2009,38(2):22-24. ZHAO Kun,SUN Huasong,LI Yongyan,et al. Study on the performance of trivalent chromium plating by sulfate plating[J]. Surface Technology,2009,38(2):22-24.
[22] LI Y J,TIAN X H. The hardness and corrosion properties of trivalent chromium hard chromium[J]. Materials Sciences and Applications,2017,8(13):1014-1026.
[23] 张鉴,华青松,郑莉莉,等. 质子交换膜燃料电池建模综述[J]. 电源技术,2019,43(6):1051-1053. ZHANG Jian,HUA Qingsong,ZHENG Lili,et al. A review of proton exchange membrane fuel cell modeling[J]. Chinese Journal of Power Sources,2019,43(6):1051-1053.
[24] TU Z M,HU HL,HOU F Y. Problems and prospect of environmentally acceptable trivalent chromium electroplating[J]. Materials Protection,2012,45(3):52-55.
[25] 杨班权,陈光南,张坤,等. 脆性涂层/韧性基体材料在拉伸应变作用下的开裂行为[J]. 机械工程学报,2008,44(5):57-61. YANG Banquan,CHEN Guangnan,ZHANG Kun,et al. Cracking behavior of brittle coating/ductile substrate materials under tensile strain[J]. Journal of Mechanical Engineering,2008,44(5):57-61.
[26] DAVYDENKO L,PLYUTO Y,MOSER E M. Characterization of sol-gel silica films doped with chromium (III) acetylacetonate[J]. Thin Solid Films,2009,517(13):3625-3628.
[27] GAO P,JI H,ZHOU Y,et al. Selective acetone gas sensors using porous WO3-Cr2O3 thin films prepared by sol-gel method[J]. Thin Solid Films,2012,520(7):3100-3106.
[28] WU H,TIAN X,ZHENG L,Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail[J]. Plasma Science and Technology,2022,24(5):054008.
[29] 吴厚朴,田修波,郑林林,等. 高功率脉冲磁控溅射管内壁沉积Cr薄膜结构及性能[J]. 中国表面工程,2022,35(5):210-216. WU Houpu,TIAN Xiubo,ZHENG Linlin,et al. Structure and properties of cr films deposited by high power impulse magnetron sputtering on inner surface of tube[J]. China Surface Engineering,2022,35(5):210-216.
[30] 黄凯,李刘合. 基体、过渡层偏压和涂层厚度对氧化铬涂层结晶取向的影响[J]. 中国表面工程,2020,33(1):73-83. HUANG Kai,LI Liuhe. Effects of substrate,interlayer bias and coating thickness on crystal orientation of chromium oxide coatings[J]. China Surface Engineering,2020,33(1):73-83.
[31] 韩永超. 管状工件内表面磁场辅助直流溅射镀膜方法的研究[D]. 沈阳:东北大学,2012. HAN Yongchao. Study on the magnetic field auxiliary direct-current sputtering method on the inner surface of tubular workpiece[D]. Shenyang:Northeastern University,2012.
[32] 田修波,吴忠振,石经纬,等. 高脉冲功率密度复合磁控溅射电源研制及放电特性研究[J]. 真空,2010,47(3):44-47. TIAN Xiubo,WU Zhongzhen,SHI Jingwei,et al. Development and discharge characteristics of a high pulse power densitycompound magnetron sputtering power supply[J]. Vacuum,2010,47(3):44-47.
[33] GONG C,TIAN X,ZHU Z,et al. Discharge characteristics induced by self-excited by radio frequency during plasma ion implantation of cylindrical bore[C]//Vacuum Technology and Surface Engingeering. 2009:358-361.
[34] BETIUK M,DOMANOWSKi P. Obtaining the CrN coating inside the barrel using a cylindrical magnetron with a dynamic magnetic field[C]//XIII International Conference Electromachining,2018:1-10.
[35] 胡明. 不同制备方法的火炮身管材料Cr涂层性能研究[D]. 太原:中北大学,2019. HU Ming. Research on the properties of Cr coatings prepared by three methods on the surface of gun barrel material[D]. Taiyuan:North University of China,2019.
[36] 张治国. 磁控溅射纳米多层膜替代电镀铬涂层的研究[D]. 大连:大连理工大学,2009. ZHANG Zhiguo. Study on magnetron sputtering nano-multilayer coating replacing electroplating chromium coating[D]. Dalian:Dalian University of Technology,2009.
[37] SIDELEV D V,POLTRONIERI C,BESTETTI M,et al. Acomparative study on high-temperature air oxidation of Cr-coated E110 zirconium alloy deposited by magnetron sputtering and electroplating[J]. Surface and Coatings Technology,2022,433(15):128134-128147.
[38] 张一鸣,张天羿,徐卫林,等. 多弧靶离子镀铬钢领的研究及应用[J]. 棉纺织技术,2017,45(8):23-27. ZHANG Yiming,ZHANG Tianyi,XU Weilin,et al. Research and application of multi-arc target ion chrome-plated collar[J]. Cotton Textile Technology,2017,45(8):23-27.
[39] HAGEDORN D,LOFFLER F,MEESS R. Magnetron sputter process for inner cylinder coatings[J]. Surface & Coatings Technology,2008,203(5-7):632-637.
[40] KAUNE G,HAGEDORN D,LOFFLER F. Magnetron sputtering process for homogeneous internal coating of hollow cylinder[J]. Surface & Coatings Technology,2016,308(25):57-61.
[41] 杨雨晨. 磁控溅射放电等离子体与非蒸发型吸气薄膜[D]. 武汉:华中科技大学,2016. YANG Yuchen. Magnetron sputtering discharge plasmas and non-evaporative getters[D]. Wuhan:Huazhong University of Science and Technology,2016.
[42] 石昌仑,张敏,林国强. 脉冲偏压对电弧离子镀深管内壁沉积TiN薄膜的影响[J]. 真空科学与技术学报,2007,13(6):517-521. SHI Changlun,ZHANG Min,LIN Guoqiang. Effect of pulsed bias on TiN film deposition on internal wall of deep tubes by arc ion plating[J]. Chinese Journal of Vacuum Science and Technology,2007,13(6):517-521.
[43] 刘琪,王文涛,林国强. 磁场对电弧离子镀深管内壁沉积TiN薄膜的影响[J]. 真空科学与技术学报,2011,31(1):71-75. LIU Qi,WANG Wentao,LIN Guoqiang. Magnetic field and TiN film growth by arc ion plating on inner walls of deep tubes[J]. Chinese Journal of Vacuum Science and Technology,2011,31(1):71-75.
[44] ZHAO Y H,GUO C Q,YANG W J,et al. TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating[J]. Vacuum,2015,112(1):46-54.
[45] 刘明,陈书赢,马国政,等. 热喷涂涂层/基体异质界面结合强度优化理论与方法现状研究[J]. 机械工程学报,2020,56(10):64-77. LIU Ming,CHEN Shuying,MA Guozheng,et al. Study on the status of the theory and method for optimizing the bond strength of thermal spray coating/substrate heterogeneous interface[J]. Journal of Mechanical Engineering,2020,56(10):64-77.
[46] 刘文朝. 爆炸喷涂Cr_3C_2-NiCr涂层工艺及性能研究[D]. 兰州:兰州理工大学,2019. LIU Wenzhao. Study on Cr_3C_2-NiCr coating process and properties by explosive spraying[D]. Lanzhou:Lanzhou University of Technology,2019.
[47] 马丽,朱亮,韩峰,等. 管内壁的粉末电爆喷涂工艺[J]. 金属热处理,2019,44(3):170-174. MA Li,ZHU Liang,HAN Feng,et al. Powder electrical explosion spraying for tube inner wall[J]. Heat Treatment of Metals,2019,44(3):170-174.
[48] 刘宗瀚. 管内壁电爆喷涂装置的研制及制备Ti3SiC2涂层的工艺试验[D]. 兰州:兰州理工大学,2020. LIU Zonghan. Development of electro-explosion spraying apparatus for tube internal wall and process test of preparation of Ti3SiC₂ coating[D]. Lanzhou:Lanzhou University of Technology,2020.
[49] 杨雄. 氧化铬基涂层的制备及其摩擦磨损性能研究[D]. 武汉:武汉理工大学,2019. YANG Xiong. The preparation and tribological properties of Cr₂O₃-based coating[D]. Wuhan:Wuhan University of Technology,2019.
[50] 蔡宏图,江涛,周勇. 热喷涂技术的研究现状与发展趋势[J]. 装备制造技术,2014,11(6):28-32. CAI Hongtu,JIANG Tao,ZHOU Yong. Research status and development trend of thermal spraying technology[J]. Equipment Manufacturing Technology,2014,11(6):28-32.
[51] 杨秀从,董天顺,李国禄,等. 超声速等离子喷涂Ni60A涂层的滚动接触疲劳寿命[J]. 机械工程学报,2016,52(20):38-43. YANG Xiucong,DONG Tianshun,LI Guolu,et al. Rolling contact fatigue life of Ni60A coating by ultrasonic plasma spraying[J]. Journal of Mechanical Engineering,2016,52(20):38-43.
[52] 蒋啸林,王燕妮,陆辛. 电爆炸喷涂技术用于提高炮管的抗烧蚀性分析[J]. 中国机械工程,2011,22(20):2494-2497. JIANG Xiaolin,WANG Yanni,LU Xin. Analysis on improvement of anti-ablation of gun tube by electro-explosive spraying technology[J]. China Mechanical Engineering,2011,22(20):2494-2497.
[53] JIANG X L,WANG Y N,LU X. Research on the mechanism of extending artillery barrel life by electrical explosion spraying technology[J]. Manufacturing Systems Engineering,2012,1493(858):19-24.
[54] DEMOKAN O. Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils[J]. IEEE Transactions on Plasma Science,2000,28(5):1720-1724.
[55] 蒲泽林,杨昆,刘宗德,等. 电热爆炸喷涂层温度场的数值模拟[J]. 机械工程学报,2005,41(3):142-145. PU Zelin,YANG Kun,LIU Zongde,et al. Numerical simulation of the temperature field of electrothermally exploded spray layer[J]. Journal of Mechanical Engineering,2000,28(5):1720-1724.
[56] 王瑞雪,叶巴丁,孔祥号,等. 低温等离子体表面强化技术研究进展[J]. 机械工程学报,2021,57(12):192-207. WANG Ruixue,YE Bading,KONG Xianghao,et al. Research progress of low temperature plasma surface hardening technology[J]. Journal of Mechanical Engineering,2021,57(12):192-207.
[57] XIE P C,Chen J X,WANG R X,et al. Plasma sprayed thermal barrier coatings:Effects of polyamide additive on injection molding part quality[J]. Journal of Applied Polymer Science,2021,139(16):51980.
[58] 阴生毅,张永清. 等离子喷涂氧化铬涂层在密封盖上的应用[C]//中国机械工程学会焊接学会第九次全国焊接会议论文集(第1册). 黑龙江人民出版社,1999:443-446. YIN Shengyi,ZHANG Yongqing. Application of plasma sprayed chromium oxide coating on seal[C]//Proceedings of the Ninth National Welding Conference(Volume 1),Welding Society of China Mechanical Engineering Society,Heilongjiang People's Publishing House,1999:443-446.
[59] 李君. 热喷涂技术应用与发展调研分析[D]. 长春:吉林大学,2015. LI Jun. Investigation and analysis of the application and development of thermal spraying technology[D]. Changchun:Jilin University,2015.
[60] FAUCHAIS P,VARDELLE M,VARDELLE A. Reliability of plasma-sprayed coatings:monitoring the plasma spray process and improving the quality of coatings[J]. Journal of Physics D:Applied Physics,2013,46(22):224016-224032.
[61] 乐志强. 氧化铬新制法[J]. 无机盐工业,1986,42(5):43-44. LE Zhiqiang. A new method for producing chromium oxide[J]. Inorganic Salt Industry,1986,42(5):43-44.
[62] 李其连,李淑青,杨伟华. 轴向送粉等离子喷涂纳米氧化铬涂层的结构与性能[J]. 材料保护,2009,42(12):7-9,80 LI Qilian,LI Shuqing,YANG Weihua. Structure and properties of nano-Cr oxide coatings by plasma spraying axial powder feeding[J]. Materials Protection,2009,42(12):7-9,80.
[63] 徐炫. Cr₂O₃纳米结构热喷涂粉末及耐磨涂层的制备研究[D]. 长沙:中南大学,2004. XU Xuan. Study on preparation of Cr₂O₃ nanostructured thermal spraying powder and wear resistant coating[D]. Changsha:Central South University,2004.
[64] 王宾,阎峰云,王永欣,等. 等离子喷涂高铬铸铁涂层的摩擦学性能[J]. 中国表面工程,2013,26(5):77-82. WANG Bin,YAN Fengyun,WANG Yongxin,et al. Tribological properties of high-chromium cast iron coating developed by plasma spraying[J]. China Surface Engineering,2013,26(5):77-82.
[65] MOREAU C,BISSON J F,LIMA R,et al. Diagnostics for advanced materials processing by plasma spraying[J]. Pure and Applied Chemistry,2013,77(2):443-462.
[66] SIDHU B S,PRAKASH S. Nickel-chromium plasma spray coatings:A way to enhance degradation resistance of boiler tube steels in boiler environment[J]. Journal of Thermal Spray Technology,2006,15(1):131-140.
[67] BOLELLI G,MESCHINI D,VARIS T,et al. Corrosion properties of thermally sprayed bond coatings under plasma-sprayed chromia coating in sulfuric acid solutions[J]. Journal of Thermal Spray Technology,2020,29(2):270-284.
[68] ZAMANI P,VALEFI Z. Microstructure,phasecomposition and mechanical properties of plasma sprayed Al₂O₃,Cr₂O₃ and Cr₂O₃-Al₂O₃composite coatings[J]. Surface & Coatings Technology,2017,316(1):138-145.
[69] MAURY F. MOCVD of hard metallurgical coatings:Examples in the Cr-C-N system[J]. Electrochimica Acta,2005,50(23):4525-4530.
[70] ITOH H,KATO K,SUGIYAMA K. Chemical vapor deposition of corrosion-resistant TiN film to the inner walls of long steel tubes[J]. Journal of Materials Science,1986,21(3):751-756.
[71] GENE F W. Chromium coatings prepared by chemical vapor deposition[J]. Journal of the Electrochemical Society,1969,116(1):5-9.
[72] HERTZ D,AUDISIO S,DEFOORT F,et al. Method of obtaining an insulating coating of chromium oxide between the pellets and the cladding of a nuclear fuel element and nuclear fuel element having such an insulating coating:Europe,0409693-A1[P]. 1991-01-23.
[73] MICHAU A,MAURY F,SCHUSTER F,et al. Chromium carbide growth by direct liquid injection chemical vapor deposition in long and narrow tubes,experiments,modelling and simulation[J]. Coatings,2018,8(6):220-240.
[74] WANG R X,XIA Z C,KONG X H,et al. Etching and annealing treatment to improve the plasma-deposited SiOx film adhesion force[J]. Surface & Coatings Technology,2021,427(15):127840-127852.
[75] SHAO T,WANG R X,ZHANG C,et al. Atmospheric-pressure pulsed discharges and plasmas:mechanism,characteristics and applications[J]. High Voltage,2018,3(1):14-20.
[76] QIN H,QIU H,HE S T,et al. Efficient disinfection of SARS-CoV-2-like coronavirus,pseudotyped SARS-CoV-2 and other coronaviruses using cold plasma induces spike protein damage[J]. Journal of Hazardous Materials,2022,430(11):128414-128427.
[77] BAI Y,CHEN S B,WANG H Y,et al. Chemical warfare agents decontamination via air mircoplasma excited by a triboelectric nanogenerator[J]. Nano Energy,2022,95(5):106992-107016.
[78] 王瑞雪,李忠文,虎攀,等. 低温等离子体化学毒剂洗消技术研究进展[J]. 电工技术学报,2021,36(13):2767-2781. WANG Ruixue,LI Zhongwen,HU Pan,et al. Research progress of low temperature plasma chemical agent decontamination technology[J]. Journal of Electrical Engineering Technology,2021,36(13):2767-2781.
[79] GAN Z L,FENG X R,HOU Y,et al. Cold plasma jet with dielectric barrier configuration:Investigating its effect on the cell membrane of E. coli and S. cerevisiae and its impact on the quality of chokeberry juice[J]. LWT-Food Science & Technology,2021,136(1):110223- 110231.
[80] 王浪平,王小峰,汤宝寅. 等离子体浸没离子注入与沉积技术的发展及前沿问题[J]. 中国表面工程,2010,23(1):9-14. WANG Langping,WANG Xiaofeng,TANG Baoyin. The development and key problems of plasma immersion ion implantation and deposition[J]. China Surface Engineering,2010,23(1):9-14.
[81] WANG X Y,SUI X D,ZHANG S T,et al. Effect of deposition pressures on uniformity,mechanical and tribological properties of thick DLC coatings inside of a long pipe prepared by PECVD method[J]. Surface & Coatings Technology,2019,375(15):150-157.
[82] 姜海富. 细长管内腔空心阴极放电等离子体离子注入/沉积研究[D]. 哈尔滨:哈尔滨工业大学,2009. JIANG Haifu. Plasma ion implantation/deposition in slender bores using hollow cathode discharge[D]. Harbin:Harbin Institute of Technology,2009.
[83] NAKAYA M,SHIMIZU M,UEDONO A. Impact of the difference in power frequency on diamond-like carbon thin film coating over 3-dimensional objects[J]. Thin Solid Films,2014,564:45-50.
[84] SILVA F,MICHAU A,BONNIN X,et al. Electromagnetic modelling of a microwave cavity used for the deposit of amorphous carbon films on the inner wall of PET bottles[J]. Diamond & Related Materials,2007,16(4):1278-1281.
[85] WANG R X,SHEN Y,ZHANG C,et al. Comparison between helium and argon plasma jets on improving the hydrophilic property of PMMA surface[J]. Applied Surface Science,2016,367(30):401-406.
[86] WANG R X,LI W Y,ZHANG C,et al. Thin insulating film deposition on copper by atmospheric-pressure plasmas[J]. Plasma Processes & Polymers,2017,14(7):1600248-1600257.
[87] 王瑞雪,海彬,田思理,等. 绝缘材料表面电荷测量优化及等离子体处理对其表面电特性的影响[J]. 高电压技术,2017,43(6):1808-1815. WANG Ruixue,HAI Bin,TIAN Sili,et al. Surface charge measurement optimization of insulating materials and the influence of plasma treatment on surface electrical properties[J]. High Voltage Technology,2017,43(6):1808-1815.
[88] WANG J W,GUPTA A,KLEIN T M,et al. Plasma enhanced chemical vapor deposition of Cr₂O₃ thin films using chromium hexacarbonyl (Cr(CO)₆₎ precursor[J]. Thin Solid Films,2008,516(21):7366-7372.
[89] 王骞. 铁基减摩涂层的制备技术及涂层性能分析[D]. 沈阳:沈阳工业大学,2015 WANG Qian. Preparation technology of iron base antifriction coating and analysis of coating performance[D]. Shenyang:Shenyang University of Technology,2015.