• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2023, Vol. 59 ›› Issue (24): 56-71.doi: 10.3901/JME.2023.24.056

• 材料科学与工程 • 上一篇    下一篇

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管状工件内表面铬基薄膜沉积技术研究进展

王瑞雪1, 王慧妍1, 薛爽1, 贺建芸1, 陈茜2, 张庆2, 谢鹏程1, 杨卫民1, 谭俊2   

  1. 1. 北京化工大学机电工程学院 北京 100029;
    2. 陆军装甲兵学院再制造技术国家重点实验室 北京 100070
  • 收稿日期:2023-02-28 修回日期:2023-08-01 出版日期:2023-12-20 发布日期:2024-03-05
  • 通讯作者: 谭俊(通信作者),男,1961年出生,博士,研究员,博士研究生导师。主要研究方向为材料表面工程。E-mail:tanjuncn@sina.com
  • 作者简介:王瑞雪,女,1987年出生,博士,教授,博士研究生导师。主要研究方向为低温等离子体特性及应用。E-mail:wrx@mail.buct.edu.cn
  • 基金资助:
    国家自然科学基金(51877205,52011530191)和中央高校基本科研业务费专项资金(buctrc201906)资助项目

Research Progress of Chromium-based Thin Film Deposition Technology on Inner Surface of Tubular Workpieces

WANG Ruixue1, WANG Huiyan1, XUE Shuang1, HE Jianyun1, CHEN Xi2, ZHANG Qing2, XIE Pengcheng1, YANG Weimin1, TAN Jun2   

  1. 1. College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029;
    2. State Key Laboratory of Remanufacturing Technology, Academy of Army Armored Forces, Beijing 100070
  • Received:2023-02-28 Revised:2023-08-01 Online:2023-12-20 Published:2024-03-05

摘要: 管状工件在工业领域应用广泛,但由于服役环境恶劣等原因导致内表面磨损、腐蚀和氧化,工件常常达不到设计寿命而过早失效,因此需要对其内表面进行镀膜以强化其使用性能。铬基材料具有硬度高、耐高温、耐腐蚀等优势,是强化工件表面性能常用的涂层材料。针对国内外对管状工件内表面进行镀铬基薄膜的不同工艺,包括电镀法、溶胶-凝胶法 、物理气相沉积法、热喷涂和化学气相沉积法等进行了综述,系统介绍了几类方法的特点及其在管状工件内表面铬基薄膜沉积的应用及技术问题。首先,对电镀法和溶胶-凝胶法进行了详细说明;其次,物理气相沉积法着重介绍了溅射镀膜与多弧离子镀方法,热喷涂从电爆喷涂、热等离子体喷涂入手分析,化学气相沉积法着重阐述了热反应气相沉积和等离子体辅助化学气相沉积方法;最后,重点从现有技术下工艺所能达到的长径比及其薄膜均匀性对几类方法进行了总结与展望。通过全面综述不同工艺的特点及应用,为管状工件内表面铬基薄膜沉积提供了技术支持和参考依据。

关键词: 管状工件, 内表面, 铬基薄膜沉积, 物理气相沉积, 化学气相沉积

Abstract: Tubular components are widely used in industrial and national defense industries. However, due to harsh operating environments, the inner surface of the component often experiences wear, corrosion, and oxidation, resulting in premature failure before reaching the design life. Therefore, it is necessary to coat the inner surface with a chromium-based film to enhance its wear resistance, corrosion resistance, and oxidation resistance. Chromium-based materials have the advantages of high hardness, high temperature resistance, and corrosion resistance, and are commonly used coating materials to improve the surface properties of components. A comprehensive review of various techniques for depositing chromium-based films on the inner surface of tubular components is provided, including electroplating, sol-gel, physical vapor deposition, thermal spraying, and chemical vapor deposition. The characteristics of each method and their applications and technical issues in depositing chromium-based films on the inner surface of tubular components are systematically introduced. First, electroplating and sol-gel methods are described in detail. Second, physical vapor deposition method focuses on sputter coating and multi-arc ion plating. Thermal spraying is analyzed from the perspectives of electric arc spraying and thermal plasma spraying. Chemical vapor deposition method emphasizes on hot reaction gas phase deposition and plasma-assisted chemical vapor deposition. Finally, the achievable aspect ratio and film uniformity of each method under current technology are summarized and prospects are discussed. The characteristics and applications of different techniques are comprehensively reviewed, providing technical support and reference for the deposition of chromium-based films on the inner surface of tubular components.

Key words: tubular workpiece, inner surface, chromium-based film deposition, physical vapor deposition, chemical vapor deposition

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