原子力显微镜探针侧向力的标定方法及误差对比分析

doi:10.3901/JME.2023.22.196

机械工程学报 ›› 2023, Vol. 59 ›› Issue (22): 196-206.doi: 10.3901/JME.2023.22.196

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原子力显微镜探针侧向力的标定方法及误差对比分析

郎浩杰, 彭倚天, 包启凡, 丁树杨, 黄瑶

东华大学机械工程学院上海 201620

收稿日期:2022-11-05 修回日期:2023-03-05 出版日期:2023-11-20 发布日期:2024-02-19
通讯作者: 彭倚天(通信作者)，男，1977年出生，博士，教授，博士研究生导师。主要研究方向为微纳机电系统、摩擦学、柔性机器人和传感器。E-mail：yitianpeng@dhu.edu.cn
作者简介:郎浩杰，男，1992年出生，博士，讲师。主要研究方向为微纳制造和微纳摩擦。E-mail：langhaojie@dhu.edu.cn
基金资助:
国家自然科学基金(52075093，51905089，51905090)、上海市青年科技英才扬帆计划(21YF1400400，19YF1401300)和中央高校基本科研业务费专项资金资助项目。

Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes

LANG Haojie, PENG Yitian, BAO Qifan, DING Shuyang, HUANG Yao

College of Mechanical Engineering, Donghua University, Shanghai 201620

Received:2022-11-05 Revised:2023-03-05 Online:2023-11-20 Published:2024-02-19

摘要/Abstract

摘要： 原子力显微镜(Atomic force microscopy, AFM)对微纳尺度机械加工实施检测和表界面力学性质测量等需要对AFM探针受到的侧向力进行实时测量，因而探针侧向力的标定直接影响测试准确性。基于不同原理的侧向力标定方法，对同一探针通过楔形法、反磁悬浮法和非接触法三种常用方法进行标定，对比三种标定方法的稳定性、误差和实用性，对比结果如下：三种标定方法的稳定性都较高，反磁悬浮法和非接触法相对于楔形法的标定误差分别为13.6%和20.4%。探针法向力标定的准确性和侧向力信号随载荷变化的线性度都会影响楔形法标定的准确性；针尖和悬浮石墨片的相对滑动会使反磁悬浮法标定结果偏大，但通过计算滑移距离可以对标定结果进行校正，减小标定误差；非接触法标定结果受探针尺寸的影响较大，可通过对探针尺寸进行表征提高标定结果的准确性。探针标定方法准确性和差异性的分析对比为不同情况下探针标定方法的选择提供了参考依据。

关键词: 原子力显微镜, 探针, 侧向力, 标定方法, 标定误差

Abstract: Micro/nano-scale machining and surface interface mechanical properties measurements that based on atomic force microscopy(AFM) require real-time detection of the lateral force of the AFM probe. Therefore, the calibration of the lateral force directly affects the accuracy of the detection. Here, the same probe is calibrated using three common methods of wedge method, diamagnetic levitation method and non-contact method that based on different principles. The stability, error and practicability of the three calibration methods are compared. The stability of the three calibration methods is relatively high. The calibration error of the diamagnetic levitation method and non-contact method is 13.6% and 20.4%, respectively, compared to the wedge method. The accuracy of the wedge method is affected by the calibration result of normal force and the linearity of the lateral force signal versus the load. The sliding between the tip and the suspended graphite makes the calibration result of the diamagnetic levitation method larger. However, by calculating the sliding distance, the calibration result can be corrected to reduce calibration errors. The calibration results of non-contact method are greatly affected by the probe size, and the calibration accuracy of non-contact method can be improved by characterizing the probe size. The analysis and comparison on the accuracy and differences of probe calibration methods provide a reference for the selection of probe calibration methods in different situations.

Key words: atomic force microscope, probes, lateral force, calibration methods, calibration error

中图分类号:

TH73
TH701

郎浩杰, 彭倚天, 包启凡, 丁树杨, 黄瑶. 原子力显微镜探针侧向力的标定方法及误差对比分析[J]. 机械工程学报, 2023, 59(22): 196-206.

LANG Haojie, PENG Yitian, BAO Qifan, DING Shuyang, HUANG Yao. Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes[J]. Journal of Mechanical Engineering, 2023, 59(22): 196-206.

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原子力显微镜探针侧向力的标定方法及误差对比分析

Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes

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