原子力显微镜探针侧向力的标定方法及误差对比分析
郎浩杰, 彭倚天, 包启凡, 丁树杨, 黄瑶
Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes
LANG Haojie, PENG Yitian, BAO Qifan, DING Shuyang, HUANG Yao
机械工程学报
.
2023, (22): 196
-206
.
DOI: 10.3901/JME.2023.22.196
