[1] Fang F Z,Zhang X D,Weckenmann A,et al. Manufacturing and measurement of freeform optics[J]. CIRP Annals,2013,62(2):823-846. [2] 闫鹏,李金银. 压电陶瓷驱动的长行程快刀伺服机构设计[J]. 光学精密工程,2020,28(2):390-397. Yan Peng,Li Jinyin. Design of the piezo-actuated long-stroke fast tool servo mechanism[J]. Optics and Precision Engineering,2020,28(2):390-397. [3] Rakuff S,Cuttino J F. Design and testing of a long-range,precision fast tool servo system for diamond turning[J]. Precision Engineering,2009,33(1):18-25. [4] 周荣晶,李云峰,纪宇阳,等. 基于混合驱动的大行程快速刀具伺服设计与控制[J]. 机械工程学报,2019,55(21):199-207. Zhou Rongjing,Li Yunfeng,Ji Yuyang,et al. Design and control of a hybrid actuation based long range fast tool servo[J]. Journal of Mechanical Engineering,2019,55(21):199-207. [5] Trumper D L,Lu X. Fast tool servos:advances in precision,acceleration,and bandwidth[M]. London:Springer,2007. [6] 吴丹,谢晓丹,王先逵. 快速刀具伺服机构研究进展[J]. 中国机械工程,2008(11):1379-1385. Wu Dan,Xie Xiaodan,Wang Xiankui. Research review on fast tool servo[J]. China Mechanical Engineering,2008(11):1379-1385. [7] Montesanti R C,Trumper D L. High bandwidth short stroke rotary fast tool servo[C]//Proc. of ASPE. 2003,30:115-118. [8] Lu X D,Trumper D L. Ultrafast tool servos for diamond turning[J]. CIRP Annals,2005,54(1):383-388. [9] Wu D,Xie X,Zhou S. Design of a normal stress electromagnetic fast linear actuator[J]. IEEE Transactions on Magnetics,2009,46(4):1007-1014. [10] 房丰洲,陈晓菲,张效栋,等. 基于自抗扰控制算法的麦克斯韦快刀伺服控制系统[J]. 纳米技术与精密工程,2017,15(5):335-341. Fang Fengzhou,Chen Xiaofei,Zhang Xiaodong,et al. Development of fast tool servo control system based on Maxwell normal force using ADRC alogrithm[J]. Nanotechnology and Precision Engineering,2017,15(5):335-341. [11] Wu D,Chen K. Frequency-domain analysis of nonlinear active disturbance rejection control via the describing function method[J]. IEEE Transactions on Industrial Electronics,2012,60(9):3906-3914. [12] Zhu W L,Yang X,Duan F,et al. Design and adaptive terminal sliding mode control of a fast tool servo system for diamond machining of freeform surfaces[J]. IEEE Transactions on Industrial Electronics,2018,66(6):4912-4922. [13] Li L,Li C X,Gu G,et al. Positive acceleration,velocity and position feedback based damping control approach for piezo-actuated nano-positioning stages[J]. Mechatronics,2017,47:97-104. [14] Sadeghpour M,De Oliveira V,Karimi A. A toolbox for robust PID controller tuning using convex optimization[J]. IFAC Proceedings Volumes,2012,45(3):158-163. [15] Zhu Z,Chen L,Huang P,et al. Design and control of a piezoelectrically actuated fast tool servo for diamond turning of micro-structured surfaces[J]. IEEE Transactions on Industrial Electronics,2020,67(8):6688-97. [16] Yi J,Chang S,Shen Y. Disturbance-observer-based hysteresis compensation for piezoelectric actuators[J]. IEEE/ASME Transactions on Mechatronics,2009,14(4):456-464. |