超精密车削表面衍射效应的研究进展

doi:10.3901/JME.2022.03.266

机械工程学报 ›› 2022, Vol. 58 ›› Issue (3): 266-275.doi: 10.3901/JME.2022.03.266

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超精密车削表面衍射效应的研究进展

何春雷¹, 任成祖¹, 王姝淇², 宗文俊³

1. 天津大学天津市装备设计与制造技术重点实验室天津 300354;
2. 天津理工大学机械工程学院天津 300384;
3. 哈尔滨工业大学精密工程研究所哈尔滨 150001

收稿日期:2021-02-16 修回日期:2021-10-11 出版日期:2022-02-05 发布日期:2022-03-19
通讯作者: 宗文俊(通信作者),男,1979年出生,博士,教授,博士研究生导师。主要研究方向为天然单晶金刚石刀具制造和超精密车削技术。E-mail:zongwenjun@hit.edu.cn
作者简介:何春雷,男,1988年出生,博士,讲师,硕士研究生导师。曾获第10届上银优秀机械博士论文奖(铜奖)。主要研究方向为超精密加工技术。E-mail:h_chunlei@126.com
基金资助:
国家自然科学基金（51935008，52175430）和博士后创新人才支持计划（BX20200234）资助项目。

Research Progress of Diffraction Effect on the Ultra-precision Cutting Surface

HE Chunlei¹, REN Chengzu¹, WANG Shuqi², ZONG Wenjun³

1. Tianjin Key Laboratory of Equipment Design and Manufacturing Technology, Tianjin University, Tianjin 300354;
2. School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384;
3. Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001

Received:2021-02-16 Revised:2021-10-11 Online:2022-02-05 Published:2022-03-19

摘要/Abstract

摘要： 超精密车削技术广泛应用于航空航天、清洁能源、光学精密器件制造等关键领域。超精密车削镜面应用于可见光波段时会出现衍射效应，导致镜面光学性能降低。为研究超精密车削表面衍射效应的来源以及相应的抑制和消除技术，学者们开展了大量研究工作，总结和归纳了相关研究工作的进展。首先分析了超精密车削表面衍射效应的来源及相应的理论模型，其次总结了抑制和消除超精密车削表面衍射效应的技术，分析了不同技术方法的特点，最后介绍了衍射效应在超精密加工领域的其他应用。

关键词: 超精密车削表面, 衍射效应, 抑制和消除技术, 抛光工艺

Abstract: Ultra-precision cutting technology is extensively applied in the key field of aerospace, clean energy and optical precision components fabrication, etc. However, when mirror fabricated by ultra-precision cutting technology is employed on the visible-wavelength, diffraction effect occurs, which degrades the work performance of metal mirror. To investigate the origins and develop suppression and elimination technology for ultra-precision cutting surface, scholars performed a lot of research. In this work, the research progress on the research work is concluded and summarized. First, the origins and theoretical models for the diffraction effect on the ultra-precision cutting surface are introduced. Then, advances in the suppression and elimination technology of diffraction effect on the ultra-precision cutting surface are summarized. The characteristics of different methods are analysed. Finally, the application of diffraction effect on the ultra-precision machining is introduced.

Key words: ultra-precision cutting surface, diffraction effect, suppression and elimination technique, polishing process

中图分类号:

TG519

何春雷, 任成祖, 王姝淇, 宗文俊. 超精密车削表面衍射效应的研究进展[J]. 机械工程学报, 2022, 58(3): 266-275.

HE Chunlei, REN Chengzu, WANG Shuqi, ZONG Wenjun. Research Progress of Diffraction Effect on the Ultra-precision Cutting Surface[J]. Journal of Mechanical Engineering, 2022, 58(3): 266-275.

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超精密车削表面衍射效应的研究进展

Research Progress of Diffraction Effect on the Ultra-precision Cutting Surface

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