超声振动辅助磨料流抛光技术研究综述

doi:10.3901/JME.2021.09.233

摘要/Abstract

摘要： 抛光加工是实现高性能零件最终表面质量要求的重要的方法。超声振动辅助磨料流抛光是磨料流抛光与超声振动相结合的复合抛光技术，在光学玻璃、蓝宝石、单晶硅、陶瓷等硬脆性材料抛光和金属材料零件复杂表面的抛光加工中具有独特的优势，可以有效地提高表面质量和抛光效率。对近年来的技术发展进行了总结，对抛光加工基本原理研究、材料去除微观机理研究、抛光工艺方法分类及应用等方面进行了系统的论述和分析。指出了这一技术当前的研究热点和需要解决的关键问题，对今后的研究、应用和发展给出了建议和展望。

关键词: 超声振动, 磨料流抛光, 去除机理

Abstract: Polishing is an important method to achieve the final surface quality requirements of high-performance parts. Ultrasonic vibration assisted abrasive flow polishing (UVAFP) is a compound polishing technology combining abrasive flow polishing technology with ultrasonic vibration technology. It is of unique advantages in the polishing of complex surfaces of hard brittle materials such as optical glass, sapphire, monocrystalline silicon, ceramics and metal parts, which can effectively improve the surface quality and polishing efficiency. The development of this technology in recent years is summarized, and the basic principle of polishing, the micro mechanism of material removal, the classification of polishing process and its application are discussed and analyzed systematically. The current research hotspots and key problems of this technology were pointed out, and suggestions and prospects for the future research, application and development of this technology are proposed.

Key words: ultrasonic vibration, abrasive flow polishing, removal mechanism

中图分类号:

TG663

李华, 任坤, 殷振, 戴晨伟, 王中旺, 魏力, 韦冬. 超声振动辅助磨料流抛光技术研究综述[J]. 机械工程学报, 2021, 57(9): 233-253.

LI Hua, REN Kun, YIN Zhen, DAI Chenwei, WANG Zhongwang, WEI Li, WEI Dong. Review of Ultrasonic Vibration-assisted Abrasive Flow Polishing Technology[J]. Journal of Mechanical Engineering, 2021, 57(9): 233-253.

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