真空气体静压轴承研究进展

doi:10.3901/JME.2025.05.013

摘要/Abstract

摘要： 随着气体静压润滑技术的不断发展及兼容真空工作环境的迫切需求，基于密封设计的真空气体静压轴承已成为近年来的研究热点之一。因其具有高动态、低摩擦、高精度和无污染等优势，在精密加工、检测等领域有着良好的应用前景。从真空气体润滑方式、结构优化及实验研究等三方面入手，详述了真空气体静压轴承的国内外研究现状。对比了真空气体静压轴承相较于传统气体轴承的优缺点，同时归纳了真空气体静压轴承的常规密封方法及高效抽排方式。在此基础上分析了真空气体静压轴承在设计中存在的支承特性、结构设计、加工工艺等关键技术问题，并对真空气体轴承未来发展趋势进行了初步展望，为真空气体静压轴承的设计提供相应依据。

关键词: 真空气体静压轴承, 轴承密封, 静态特性, 结构优化, 实验研究

Abstract: With the development of aerostatic lubrication technology and the urgent need of compatible vacuum working environment, vacuum aerostatic bearing based on sealing design has become one of the hot topics. Because of its advantages of high dynamic, frictionless, high precision, and no pollution, it has a good application prospect in precision machining, measurement and other fields. It provides in detail overview of the research status of vacuum aerostatic bearings both domestically and internationally, including lubrication mechanism, structure optimization, and experiment research. The advantages and disadvantages of vacuum aerostatic bearings compared with traditional aerostatic bearings are compared, and the conventional sealing methods and efficient extraction methods of vacuum aerostatic bearings are summarized. On this basis, the critical technical problems such as support characteristics, structural design, and processing technology that need to be solved in the design of vacuum aerostatic bearings are analysed, and the future development trend of vacuum aerostatic bearings is preliminarily prospected, which provides the corresponding basis for the design of vacuum aerostatic bearings.

Key words: vacuum aerostatic bearing, bearing seal, static characteristic, structure optimization, experiment research

中图分类号:

TH133

吴剑威, 王继尧, 郑健, 赵鹏越, 高席丰, 温众普. 真空气体静压轴承研究进展[J]. 机械工程学报, 2025, 61(5): 13-25.

WU Jianwei, WANG Jiyao, ZHENG Jian, ZHAO Pengyue, GAO Xifeng, WEN Zhongpu. Research Progress of Vacuum Aerostatic Bearing[J]. Journal of Mechanical Engineering, 2025, 61(5): 13-25.

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