超精密气浮关键技术及发展趋势

doi:10.3901/JME.2025.05.001

摘要/Abstract

摘要： 超精密测量是指准确度优于100 nm量级的测量。高端制造通常需要在超精密量级上，例如将光机分成数十个系统、上千个零部件高度集成、协同工作才能实现。因此，超精密测量是建立国家测量体系和完整制造连、产业链的基石，是装备制造业向中高端跨越的必要条件。在超精密测量技术体系中，直线/回转运动基准就像是仪器装备的骨骼，其精度和性能很大程度上决定了仪器装备的整体精度和性能。气浮技术的一般精度就达到0.1 μm/100 mm，且具有摩擦小寿命长的特点，已经成为实现超精密测量的核心技术支撑。根据气浮装备工作原理与结构的分析，提出了性能提升方法中的两类矛盾、以及两者在结构设计上的统一性；分析了工程计算法、表压比法、气阻计算法、有限元法等主要设计方法的特点，归纳总结各方法的适用范围；最后，从装备需求、性能提升、分析计算、创新结构方面展望了国内静压气浮技术的发展趋势，指出突破现有技术指标所面临的问题和发展方向。

关键词: 气浮技术, 高精度, 设计方法, 性能计算

Abstract: Ultra precision measurement refers to accuracy superior to the 100 nm, which is the cornerstone of establishing a national measurement system and a complete manufacturing chain and industrial chain. It is also a necessary condition for the equipment manufacturing industry to leap towards the mid to high end. High end manufacturing equipment typically requires highly integrated optical, mechanical, and electronic control subsystems, as well as thousands of components, at the ultra precision level, and can only be achieved through collaborative work. Among them, the linear/rotational motion benchmark is like the skeleton of the instrument equipment, and its accuracy and performance largely determine the overall accuracy and performance of the instrument equipment. The general accuracy of aerostatic lubrication technology can reach 0.1 μm/100 mm, with the characteristic of low friction and long service life, has become the core technical support for achieving ultra precision measurement. It is outlined that an overview of the structural characteristics and working principles of aerostatic equipment, and puts forward two kinds of contradictions in the methods of improving the performance, as well as their unity. Analyze the characteristics of engineering calculation method, gauge pressure ratio method, gas resistance calculation method, finite element method and other main design methods, and at last summarize the application scope of each method. It looks forward to the development trend of aerostatic technology, points out the specific problems faced by breaking through the existing technical indicators, and gives the solutions to the core problems.

Key words: aerostatic bearing technology, high-precision, design method, performance calculation

中图分类号:

TG47

温众普, 石照耀, 谭久彬, 吴剑威, 崔海龙. 超精密气浮关键技术及发展趋势[J]. 机械工程学报, 2025, 61(5): 1-12.

WEN Zhongpu, SHI Zhaoyao, TAN Jiubin, WU Jianwei, CUI Hailong. Key Technology and Developing Trend of Ultra-precision Aerostatic Bearing[J]. Journal of Mechanical Engineering, 2025, 61(5): 1-12.

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