真空气体静压轴承研究进展

吴剑威, 王继尧, 郑健, 赵鹏越, 高席丰, 温众普

Research Progress of Vacuum Aerostatic Bearing

WU Jianwei, WANG Jiyao, ZHENG Jian, ZHAO Pengyue, GAO Xifeng, WEN Zhongpu

机械工程学报 . 2025, (5): 13 -25 . DOI: 10.3901/JME.2025.05.013