超声椭圆振动切削闪耀光栅的三维形貌建模及控制方法

doi:10.3901/JME.2023.17.291

机械工程学报 ›› 2023, Vol. 59 ›› Issue (17): 291-299.doi: 10.3901/JME.2023.17.291

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超声椭圆振动切削闪耀光栅的三维形貌建模及控制方法

杨洋, 林日雄, 杜建军

哈尔滨工业大学(深圳)机电工程与自动化学院深圳 518055

收稿日期:2022-11-08 修回日期:2023-04-15 出版日期:2023-09-05 发布日期:2023-11-16
通讯作者: 杨洋(通信作者),男,1992年出生,助理教授,硕士研究生导师。主要研究方向为超精密加工技术,智能伺服机构,功能性微纳结构表面设计制造。E-mail:yangyang2020@hit.edu.cn
作者简介:林日雄,男,1997年出生,硕士研究生。主要研究方向为超声椭圆振动切削工艺,结构色表面精密制造。E-mail:15813728748@163.com;杜建军,男,1974年出生,教授,博士研究生导师。主要研究方向为超精密加工,气浮轴承,气体润滑。E-mail:jjdu@hit.edu.cn
基金资助:
国家自然科学基金（52105438）、广东省自然科学基金（2021A1515011738，2020A1515110351）和深圳市优秀科技创新人才培养（RCBS20210609103710027）资助项目。

Study of the 3D Topography Modelling and Control Method for Blazed Gratings Induced by Ultrasonic Elliptical Vibration Cutting

YANG Yang, LIN Rixiong, DU Jianjun

School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen 518055

Received:2022-11-08 Revised:2023-04-15 Online:2023-09-05 Published:2023-11-16

摘要/Abstract

摘要： 针对超声椭圆振动切削纳米级闪耀光栅工艺中光栅三维形貌难以精准预测及控制的技术难题，提出囊括合成切削轨迹、刀具三维几何特征及工件材料属性的光栅三维形貌迭代更新预测方法，并综合考虑最小切削厚度效应及后刀面与已加工表面间强犁压相互作用对其的影响规律。以间距为1 μm，闪耀角为12°，高度为106 nm的理想光栅三维形貌为例，实现了基于上述方法设定相应工艺参数组合的光栅三维形貌确定性加工。试验结果显示光栅间距，闪耀角及高度的加工误差分别为1.1%，4.1%，15.0%，表明了所提出光栅三维形貌控制方法的可行性与准确性，并讨论了进一步提高加工精度的技术路径。此外，展示了累计切削行程超过10米后刀具切削刃区域无明显磨损，所加工光栅质量也并未随切削行程增加而出现恶化。

关键词: 闪耀光栅, 超声椭圆振动切削, 三维形貌, 超精密加工, 微纳结构

Abstract: To overcome the technical difficulties for accurately predicting and controlling the 3D topography of nanoscale blazed gratings induced by ultrasonic elliptical vibration cutting, an iterative surface updating method for grating 3D topography is proposed by considering the synthetic cutting trajectory, three-dimensional geometric characteristics of cutting tool as well as workpiece material properties. The effect of minimum uncut chip thickness and intensive interaction between tool flank and machined surface are also included. Taking the ideal grating 3D topography with 1μm spacing, 12 ° blazed angle and 106 nm grating height as an example, the deterministic generation of blazed grating with desired 3D topography is realized by setting the process parameters based on the above method. The experimental results show that the machining errors of grating spacing, blazed angle and grating height are 1.1%, 4.1% and 15.0% respectively, which indicates the feasibility and accuracy of the proposed control method for 3D topography of blazed gratings. The technical paths to further improve the machining accuracy of blazed gratings are then discussed. In addition, the machined grating quality does not deteriorate with the increment of cutting distance as no obvious tool wear around the cutting edge being observed even when the cumulative cutting distance exceeds 10 meters.

Key words: blazed gratings, ultrasonic elliptical vibration cutting, 3D topography, ultra-precision machining, micro/nano-structures

中图分类号:

TG156

杨洋, 林日雄, 杜建军. 超声椭圆振动切削闪耀光栅的三维形貌建模及控制方法[J]. 机械工程学报, 2023, 59(17): 291-299.

YANG Yang, LIN Rixiong, DU Jianjun. Study of the 3D Topography Modelling and Control Method for Blazed Gratings Induced by Ultrasonic Elliptical Vibration Cutting[J]. Journal of Mechanical Engineering, 2023, 59(17): 291-299.

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超声椭圆振动切削闪耀光栅的三维形貌建模及控制方法

Study of the 3D Topography Modelling and Control Method for Blazed Gratings Induced by Ultrasonic Elliptical Vibration Cutting

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