基于多波长散射光特性的铝合金超精密车削表面粗糙度测量方法研究

doi:10.3901/JME.2023.03.308

机械工程学报 ›› 2023, Vol. 59 ›› Issue (3): 308-317.doi: 10.3901/JME.2023.03.308

扫码分享

基于多波长散射光特性的铝合金超精密车削表面粗糙度测量方法研究

何春雷¹, 张建国², 王姝淇³, 任成祖¹

1. 天津大学天津市装备设计与制造技术重点实验室天津 300354
2. 华中科技大学数字制造装备与技术国家重点实验室武汉 430074
3. 天津理工大学天津市先进机电系统设计与智能控制重点实验室天津 300384

收稿日期:2022-02-03 修回日期:2022-10-15 出版日期:2023-02-05 发布日期:2023-04-23
通讯作者: 任成祖(通信作者),男,1962年出生,博士,教授,博士研究生导师。主要研究方向为超精密加工理论、工艺与装备。E-mail:renchz@tju.edu.cn
作者简介:何春雷,男,1988年出生,博士,副教授,博士研究生导师,曾获第10届上银优秀机械博士论文奖铜奖等奖励。主要研究方向为超精密加工理论、工艺与装备。E-mail:h_chunlei@126.com;clhe@tju.edu.cn
基金资助:
国家自然科学基金(52175430，51935008，52105478)和博士后创新人才支持计划(BX20200234)资助项目。

Investigation on Measurement Method of Ultra-precision Turning Surface Roughness Based on Multi-wavelength Scattering Characteristic

HE Chunlei¹, ZHANG Jianguo², WANG Shuqi³, REN Chengzu¹

1. Tianjin Key Laboratory of Equipment Design and Manufacturing Technology, Tianjin University, Tianjin 300354;
2. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074;
3. Tianjin Key Laboratory of the Design and Intelligent Control of the Advanced Mechatronical System, Tianjin University of Technology, Tianjin 300384

Received:2022-02-03 Revised:2022-10-15 Online:2023-02-05 Published:2023-04-23

摘要/Abstract

摘要： 针对超精密车削表面,提出一种基于多波长散射光特性的表面粗糙度测量方法,以铝合金为例对该方法进行验证。首先建立超精密车削表面形貌-散射光模型并开展验证实验,定量实验结果证明建立的散射光模型平均误差仅为1%。基于散射光模型研究刀痕纹理方向、刀痕宽度(每转进给量)和刀痕高度(表面粗糙度峰谷值)对镜像光反射率的影响,研究结果证明表面粗糙度是影响镜像光反射率的关键因素。在此基础上进一步建立300~700 nm波长范围内镜像光反射率平均值和表面粗糙度之间的定量关系,基于超精密车削表面的测量结果对该定量关系进行验证。所提出新方法获得的粗糙度测量结果与原子力显微镜测量结果吻合,最大相对误差仅为7.5%。

关键词: 超精密加工, 散射特性, 表面粗糙度, 测量方法

Abstract: For ultra-precision turning surface, a surface roughness measurement method based on a multi-wavelength scattering characteristic is proposed, which is further validated with an aluminum alloy material. First, a theoretical model of surface topography-light scattering for ultra-precision turning surface are established. A validation experiment is performed. Quantitative experimental results show that the average error of the scattering model is only 1%. Based on this scattering model, the influence of turning mark direction, turning mark width (feed rate per revolution), and turning mark height (peak-valley surface roughness) on the specular reflectivity is studied. Investigation results show that surface roughness is the critical influencing factor of specular reflectivity. On this basis, the quantitative relationship between average specular reflectivity from 300 to 700 nm and surface roughness is established, which is validated based on the ultra-precision diamond turning experiment results. The surface roughness results achieved by the newly developed method is consistent with the results measured by atomic force microscope (AFM). The maximum relative error is only 7.5%.

Key words: ultra-precision machining, scattering characteristic, surface roughness, measurement method

中图分类号:

TG519

何春雷, 张建国, 王姝淇, 任成祖. 基于多波长散射光特性的铝合金超精密车削表面粗糙度测量方法研究[J]. 机械工程学报, 2023, 59(3): 308-317.

HE Chunlei, ZHANG Jianguo, WANG Shuqi, REN Chengzu. Investigation on Measurement Method of Ultra-precision Turning Surface Roughness Based on Multi-wavelength Scattering Characteristic[J]. Journal of Mechanical Engineering, 2023, 59(3): 308-317.

参考文献

[1] 袁巨龙,张飞虎,戴一帆,等. 超精密加工领域科学技术发展研究[J]. 机械工程学报,2010,46(15):161-177.
YUAN Julong,ZHANG Feihu,DAI Yifan,et al. Development research of science and technologies in ultra-precision machining field[J]. Journal of Mechanical Engineering,2010,46(15):161-177.
[2] 郭隐彪,杨炜,王振忠,等. 大口径光学元件超精密加工技术与应用[J]. 机械工程学报,2013,49(19):171-178.
GUO Yinbiao,YANG Wei,WANG Zhenzhong,et al. Technology and application of ultra-precision machining for large size optic[J]. Journal of Mechanical Engineering,2013,49(19):171-178.
[3] 何春雷,任成祖,王姝淇,等. 超精密车削表面衍射效应的研究进展[J]. 机械工程学报,2022,58(3):266-275.
HE Chunlei,REN Chengzu,WANG Shuqi,et al. Research progress of diffraction effect on the ultra-precision cutting surface[J]. Journal of Mechanical Engineering,2022,58(3):266-275.
[4] 何宝凤,丁思源,魏翠娥,等. 三维表面粗糙度测量方法综述[J]. 光学精密工程,2019,27(1):78-93.
HE Baofeng,DING Siyuan,WEI Cuie,et al. Review of measurement methods for areal surface roughness[J]. Optics and Precision Engineering,2019,27(1):78-93.
[5] POON C Y,BHUSHAN B. Comparison of surface roughness measurements by stylus profiler,AFM and non-contact optical profiler[J]. Wear,1995,190(1):76-88.
[6] RADHAKRISHNAN V. Effect of stylus radius on the roughness values measured with tracing stylus instruments[J]. Wear,1970,16(5):325-335.
[7] 张俊杰,孙涛,闫永达,等. 单晶铜原子力显微镜加工过程亚表面变形层的分子动力学仿真[J]. 机械工程学报,2009,45(1):174-179.
ZHANG Junjie,SUN Tao,YAN Yongda,et al. Molecular dynamics simulation of subsurface deformed layers in nanometric cutting using atomic force microscope pin tool[J]. Journal of Mechanical Engineering,2009,45(1):174-179.
[8] PAVEL P,ERIK M. White-light interferometer without mechanical scanning[J]. Optics and Lasers in Engineering,2020,124:105800.
[9] 屈铭,郑俊杰,李敏,等. 基于扫描白光干涉法的LCOS芯片像素级相位分析[J]. 光子学报,2019,48(9):116-123.
QU Ming,ZHENG Junjie,LI Min,et al. Pixel-level observation of phase profile in liquid crystal on silicon device by white light scanning interferometry[J]. Acta Photonica Sinica,2019,48(9):116-123.
[10] PAVLICEK P,HYBL O. White-light interferometry on rough surfaces-measurement uncertainty caused by surface roughness[J]. Applied Optics,2008,47(16):2941-2949.
[11] PAVLICEK P,HYBL O. White-light interferometry on rough surfaces-measurement uncertainty caused by noise[J]. Applied Optics,2012,51(4):465-473.
[12] LEI Z,LIU X,CHEN L,et al. A novel surface recovery algorithm in white light interferometry[J]. Measurement,2016,80:1-11.
[13] MA L,JIA J,PEI X,et al. A robust surface recover algorithm based on random phase noise correction for white light interferometry[J]. Optics and Lasers in Engineering,2020,128:106016.
[14] 刘恒彪,王昌灵. 抛喷丸表面的多波长散斑自相关法粗糙度测量[J]. 光学学报,2010,30(9):2578-2584.
LIU Hengbiao,WANG Changling. Roughness measurement of shot-blasted surface based on polychromatic speckle autocorrelation[J]. Acta Optica Sinica,2010,30(9):2578-2584.
[15] 蔡雯,陈培锋,王英,等. 基于激光散射的表面粗糙度测量系统研究[J]. 激光技术,2020,44(5):611-615.
CAI Wen,CHEN Peifeng,WANG Ying,et al. Research of surface roughness measurement system based on laser scattering[J]. Laser Technology,2020,44(5):611-615.
[16] 易怀安,刘坚,路恩会. 基于图像清晰度评价的磨削表面粗糙度检测方法[J]. 机械工程学报,2016,52(16):15-21.
YI Huaian,LIU Jian,LU Enhui. Detection method of grinding surface roughness based on image definition evaluation[J]. Journal of Mechanical Engineering,2016,52(16):15-21.
[17] 杨晨,方红萍,邹凌云,等. 基于色彩均匀敏感度的磨削表面粗糙度测量[J]. 机电工程,2021,38(6):755-761.
YANG Chen,FANG Hongping,ZOU Lingyun,et al. Grinding surface roughness measurement based on color uniformity sensitivity[J]. Journal of Mechanical and Electrical Engineering,2021,38(6):755-761.
[18] SCHRÖDER S,DUPARRÉ A,CORIAND L,et al. Modeling of light scattering in different regimes of surface roughness[J]. Optics Express,2011,19(10):9820-9835.
[19] JACKSON D R,WINEBRENNER D P,ISHIMARU A. Comparison of perturbation theories for rough surface scattering[J]. Journal of the Acoustical Society of America,1988,83(3):961-969.
[20] 黄昆涛,房丰洲,宫虎. 超精密车削表面微观形貌对光学特性的影响[J]. 光学精密工程,2013,21(1):101-107.
HUANG Kuntao,FANG Fengzhou,GONG Hu. Study on the optical characteristics of the surface microscopic topology generated by ultra-precision turning[J]. Optics and Precision Engineering,2013,21(1):101-107.
[21] FANG F Z,HUANG K T,GONG H,et al. Study on the optical reflection characteristics of surface micro-morphology generated by ultra-precision diamond turning[J]. Optics and Lasers in Engineering,2014,62:46-56.
[22] WU D,KANG C,LIANG F,et al. Diffractive optical characteristics of nanometric surface topography generated by diamond turning[J]. Journal of Manufacturing Processes,2021,67:23-34.
[23] GUENTHER K H,WIERER P G,BENNETT J M. Surface roughness measurements of low-scatter mirrors and roughness standards[J]. Applied Optics,1984,23(21):3820-3836.
[24] LEACH R K,GIUSCA C L,HAITJEMA H,et al. Calibration and verification of areal surface texture measuring instruments[J]. CIRP Annals,2015,64(2):797-813.
[25] KIM H Y,SHEN Y F,AHN J H. Development of a surface roughness measurement system using reflected laser beam[J]. Journal of Materials Processing Technology,2002,130:662-667.
[26] LIU J,YAMAZAKI K,ZHOU Y,et al. A reflective fiber optic sensor for surface roughness in-process measurement[J]. Journal of Manufacturing Science and Engineering,2002,124(3):515-522.
[27] HARVEY J E. Parametric analysis of the effect of scattered light upon the modulation transfer function[J]. Optical Engineering,2013,52(7):1-12.
[28] KRYWONOS A,HARVEY J E,CHOI N. Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles[J]. JOSA A,2011,28(6):1121-1138.
[29] ZONG W J,HUANG Y H,ZHANG Y L,et al. Conservation law of surface roughness in single point diamond turning[J]. International Journal of Machine Tools and Manufacture,2014,84:58-63.
[30] HE C L,ZONG W J,SUN T. Origins for the size effect of surface roughness in diamond turning[J]. International Journal of Machine Tools and Manufacture,2016,106:22-42.
[31] HE C L,ZONG W J,XUE C X,et al. An accurate 3D surface topography model for single-point diamond turning[J]. International Journal of Machine Tools and Manufacture,2018,134:42-68.
[32] HE C L,WANG S J,ZONG W J,et al. Influence of tool edge waviness on the diffraction effect of diamond-turned optics:theoretical simulation and experimental validation[J]. Applied Optics,2019,58(6):1596-1605.
[33] HE C L,ZONG W J,CAO Z M. Influence of defects in the aluminium alloy Al6061 on the diffraction effect of diamond turned optics[J]. Optik,2020,223:165629.
[34] 何春雷. 铝合金超精密车削表面微观形貌对衍射效应影响的研究[D]. 哈尔滨:哈尔滨工业大学,2019.
HE Chunlei. Investigation on the influence of ultraprecision turning aluminium alloy surface micro morphology on the diffraction effect[D]. Harbin:Harbin Institute of Technology,2019.
[35] GUSHCHIN I,TISHCHENKO A V. Fourier modal method for relief gratings with oblique boundary conditions[J]. JOSA A,2010,27(7):1575-1583.
[36] 李萍. 基于白光干涉法的表面形貌评价和误差补偿[D]. 大连:大连理工大学,2021.
LI Ping. Surface topography evaluation and error compensation based on white light interferometry[D]. Dalian:Dalian University of Technology,2021.
[37] 刘振学,黄仁和,田爱民. 实验设计与数据处理[M]. 北京:化学工业出版社,2005.
LIU Zhenxue,HUANG Renhe,TIAN Aimin. Experimental design and data processing[M]. Beijing:Chemical Industry Press,2005.

基于多波长散射光特性的铝合金超精密车削表面粗糙度测量方法研究

Investigation on Measurement Method of Ultra-precision Turning Surface Roughness Based on Multi-wavelength Scattering Characteristic

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	刘鑫, 张俊, 徐斌斌, 刘弘光, 赵万华. 激光辅助铣削过程的预热温度场调控方法研究[J]. 机械工程学报, 2024, 60(9): 218-228.
[2]	朱少禹, 张向军, 孙军, 王大刚. 粗糙表面轴承微极流体润滑的平均流量模型[J]. 机械工程学报, 2024, 60(7): 203-211.
[3]	李子清, 崔长彩, 卞素标, 李慧慧, 陆静, ORIOL Arteaga, 徐西鹏. 单晶金刚石衬底超精密加工损伤层无损测量与表征[J]. 机械工程学报, 2024, 60(4): 239-249.
[4]	何春雷, 王姝淇, 李东洋, 耿昆, 陈光, 任成祖. 晶粒对多晶材料超精密切削影响的研究进展[J]. 机械工程学报, 2024, 60(3): 373-392.
[5]	温雪龙, 赵正豪, 巩亚东, 李俊鹏. FeCoNiCrAl_x高熵合金铣削表面质量影响因素实验研究[J]. 机械工程学报, 2024, 60(17): 367-378.
[6]	张园, 徐念伟, 鲍岩, 董志刚, 韩松, 郭东明, 康仁科. 轴向超声辅助端面磨削金属表面形貌及粗糙度预测[J]. 机械工程学报, 2023, 59(5): 307-316.
[7]	张瑜, 康仁科, 高尚, 黄金星, 朱祥龙. 湿式机械化学磨削单晶硅的软磨料砂轮及其磨削性能[J]. 机械工程学报, 2023, 59(3): 328-336.
[8]	陈磊, 刘阳钦, 唐川, 蒋翼隆, 石鹏飞, 钱林茂. 面向超精密加工的微观材料去除机理研究进展[J]. 机械工程学报, 2023, 59(23): 229-264.
[9]	戴一帆, 彭小强, 薛帅, 蒋庄德. 高性能光学制造[J]. 机械工程学报, 2023, 59(21): 1-14.
[10]	李涛, 黄惟琦, 龙归, 杨思铄, 张建国, 肖峻峰, 许剑锋. 单晶硅的激光抛光表面形貌演化[J]. 机械工程学报, 2023, 59(21): 52-64.
[11]	彭小强, 李煌, 王跃明, 关朝亮, 胡皓, 赖涛, 徐超. 化学镀NiP的凸面闪耀光栅超精密切削特性研究[J]. 机械工程学报, 2023, 59(21): 121-130.
[12]	杨洋, 林日雄, 杜建军. 超声椭圆振动切削闪耀光栅的三维形貌建模及控制方法[J]. 机械工程学报, 2023, 59(17): 291-299.
[13]	郭国强, 杨博宇, 李建华, 成群林, 王大中, 林立芳, 沈彬. 基于切削运动学分析的铣削加工表面粗糙度预测方法研究[J]. 机械工程学报, 2023, 59(13): 314-324.
[14]	滕洪钊, 邓朝晖, 吕黎曙, 谷倩微, 刘涛, 卓荣锦. 多传感器信息融合的加工过程状态监测研究[J]. 机械工程学报, 2022, 58(6): 26-41.
[15]	李波波, 李晓强, 王磊, 魏培, 卢秉恒. 一种低功率实现高表面质量的细丝增材制造试验研究[J]. 机械工程学报, 2022, 58(21): 297-305.