关键词: 残余面积最大压深模型, 纳米压痕, 压痕尺寸效应, 硬度, 原子力显微镜

Abstract: Single crystal aluminium and single crystal silicon are used for nanoindentation experiment where peak load and max depth are obtained from experiment. 3D morphology images of nanoindentation are obtained by atomic force microscopy, and residual areas are obtained from atomic force microscopy (AFM) images. Based on maximal depth and residual area, a new model-residual area max depth model is proposed for indentation size effect (ISE) of nanoindentation hardness. The model can understand and describe ISE of material indentation hardness better. Finally, comparison and analysis are carried out between the model and other several typical theories and mod-els.

Key words: Atomic force microscopy, Residual area maximal depth model, Hardness, Indentation size effect, Nanoindentation