关键词: 超精密加工, 非球面, 抛光

Abstract: The requirement of profile accuracy and surface quality for aspherical surface has become higher and higher with the expanding application range and raising application precision demand. As the finishing process, the ultra-precision polishing method for aspherical surface is drawing great attention from countries around the world. For improving the precision and efficiency of aspheric surface polishing, an understanding of the mechanisms of material removal in ultra-precision aspheric polishing, as well as the sub-surface damage imparted, is essential prerequisites. Historical progress of aspheric polishing techniques is plotted, and based on the development of aspheric polishing methods, the present advanced ultra-precision aspheric polishing methods are described with emphasis on the processing mechanisms and examples. The different ultra-precision aspheric polishing methods are compared in terms of sub-surface damage and edge effect. And aiming to high finishing accuracy and high efficiency, the probable further trend of ultra-precision aspheric polishing technology is forecasted.

Key words: Aspherical surface, Polishing, Ultra-precision machining