微透镜阵列模具非接触保形抛光技术研究

doi:10.3901/JME.260387

机械工程学报 ›› 2026, Vol. 62 ›› Issue (7): 418-426.doi: 10.3901/JME.260387

• 制造工艺与装备 • 上一篇

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微透镜阵列模具非接触保形抛光技术研究

李琳光¹, 景召^1,2, 孟德庆¹, 任明俊^3,4, 朱利民³, 郭江¹

1. 大连理工大学高性能精密制造全国重点实验室大连 116024;
2. 中国科学院上海光学精密机械研究所上海 201800;
3. 上海交通大学机械与动力工程学院上海 200240;
4. 霖鼎光学(上海)有限公司上海 201109

收稿日期:2025-04-17 修回日期:2025-09-12 发布日期:2026-05-25
作者简介:李琳光，男，1994年出生，博士研究生。主要研究方向为微细结构保形抛光。E-mail:lilinguang1026@163.com
郭江(通信作者)，男，1982年出生，博士，教授，博士研究生导师。主要研究方向为精密与超精密加工、光学制造、执行器、机电一体化等。E-mail:guojiang@dlut.edu.cn
基金资助:
国家重点研发计划(2022YFB3403300)和宁波市重点研发计划暨“揭榜挂帅”(2023Z019)资助项目。

Investigation on Non-contact Conformal Polishing of Microlens Array Mold

LI Linguang¹, JING Zhao^1,2, MENG Deqing¹, REN Mingjun^3,4, ZHU Limin³, GUO Jiang¹

1. State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024;
2. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800;
3. School of Mechanical and Power Engineering, Shanghai Jiao Tong University, Shanghai 200240;
4. Linding Optics (Shanghai) Co., Ltd., Shanghai 201109

Received:2025-04-17 Revised:2025-09-12 Published:2026-05-25

摘要/Abstract

摘要： 微透镜阵列元件因其特有的光束整形、均分、扩散和微聚焦等多种功能，被广泛应用于红外探测、光电感知等先进成像系统中。其元件批量化制造多采用注塑和模压工艺将模具表面的微细结构精确复制到元件表面。由于超精密切削制得的模具表面存在刀纹等缺陷限制了元件性能的进一步提升，需要后续抛光处理。针对目前微透镜阵列抛光技术难以兼顾面形精度与表面质量的技术难题，提出了一种用于微透镜阵列模具的剪切增稠非接触保形抛光方法，设计了面向球面模具全口径抛光工具，分析了抛光过程中模具流体动压力和滑移速度的分布，研究了针对Ni-P合金材质微透镜阵列结构的抛光性能。结果表明，提出的剪切增稠保形抛光对微透镜阵列结构具有优异的抛光性能。抛光后，微透镜阵列表面的刀纹等缺陷得到了显著去除，高频误差得到了显著降低，彩虹纹现象得到了显著抑制；模具表面粗糙度由初始的2.01 nm Sa下降至1.07 nm Sa，抛光前后面形精度变化小于25 nm。

关键词: 微透镜阵列, 剪切增稠抛光, 保形抛光性能, 刀纹去除, 面形保持

Abstract: Microlens array elements are widely used in advanced imaging systems such as infrared detection and photoelectric sensing due to their unique functions such as beam shaping, equalization, diffusion and microfocusing. The mass manufacturing of its components mostly uses injection molding and molding processes to accurately copy the microstructure on the surface of the mold to the surface of the component. Due to the defects such as knife lines on the surface of the mold obtained by ultra-precision and close cutting, the further improvement of the performance of the component is limited, and subsequent polishing treatment is required. In order to solve the technical problem that the current microlens array polishing technology is difficult to take into account the surface shape accuracy and surface quality, a non-contact conformal polishing method based on shear thickening principle for microlens array molds is proposed, a full-diameter polishing tool for spherical molds is designed, the distribution of surface stress and slip velocity of the mold during polishing is analyzed, and the polishing performances of the Ni-P alloy microlens array is studied. The results show that the proposed shear thickening conformal polishing has excellent polishing performances for the microlens array structure. After polishing, the defects such as knife lines on the surface of the microlens array are significantly removed, the high-frequency error is significantly reduced, and the rainbow pattern phenomenon is significantly suppressed. The surface roughness of the mold decreased from the initial 2.01 nm Sa to 1.07 nm Sa, and the shape accuracy before and after polishing changed by less than 25 nm.

Key words: microlens arrays, shear thickening polishing, conformal polishing performances, tool mark remove, shape retention

中图分类号:

TG175

李琳光, 景召, 孟德庆, 任明俊, 朱利民, 郭江. 微透镜阵列模具非接触保形抛光技术研究[J]. 机械工程学报, 2026, 62(7): 418-426.

LI Linguang, JING Zhao, MENG Deqing, REN Mingjun, ZHU Limin, GUO Jiang. Investigation on Non-contact Conformal Polishing of Microlens Array Mold[J]. Journal of Mechanical Engineering, 2026, 62(7): 418-426.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260387

http://www.cjmenet.com.cn/CN/Y2026/V62/I7/418

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微透镜阵列模具非接触保形抛光技术研究

Investigation on Non-contact Conformal Polishing of Microlens Array Mold

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