• CN:11-2187/TH
  • ISSN:0577-6686

›› 1992, Vol. 28 ›› Issue (2): 103-107.

• 论文 • 上一篇    下一篇

双盘式渐开线测量装置的误差补偿方法

佟晓冬;王立鼎   

  1. 中国科学院长春光机所
  • 发布日期:1992-03-01

THE ERROR COMPENSATION METHOD FOR THE MEASURING APPARATUS OF DOUBLE-DISH INVOLUTE

Tong Xiaodong;Wang Liding   

  1. Changchun Institute of Optics and Fine Mechanics Academia Sinica
  • Published:1992-03-01

摘要: 本文以双盘式渐开线测量装置为研究对象,研究了对此装置的微机误差补偿方法。采用了三次样条函数等数学手段建立误差补偿数学模型,使装置不确定度由原来的≤±0.7μm下降到≤±0.5μm。

关键词: 渐开线检查仪, 误差

Abstract: Double-dish involute measuring apparatus is investigated in the paper. The method of microcomputer error compensation is presented. This method can be used to compensate the apparatus error. We establish the error compensation mathematical model with the function of cubic spline. The uncertainty of apparatas can be reduced from≤±0.7μm to≤±0.5μm.

Key words: 渐开线检查仪, 误差