关键词: 标定, 弹性元件, 放大电路, 力传感器

Abstract: The development of micro force sensor includes configuration and periphery circuit design. Through the analysis of material and structure form, annular elasticity element is designed in 35CrMnSiA. 35CrMnSiA is always used in high precision sensor, which has biggish strain capacity of 1.0×10–3～1.5×10–3. Annular elasticity element has characters of structure simplification, stabilization, high vibration-self value and high sensitive value. The software of Abacus optimizes annular elasticity element, the analysis ascertains the position where the strain piece should affix, and the analysis indicates that annular elasticity element is in the command of strain and stress. An-nular elasticity element is machined by wire cut after quencher treatment and midst temperature temper for the raw material 35CrMnSiA. Periphery circuit includes the design of zero ad-justment, temperature compensation and amplification function, which assures the high precision. Under the condition of static state, demarcation is done by experiment with the main static eigenvalue of hysteresis 0.64%, repeatability 0.45% and linearity 0.55%. The force sensor belongs to precision level and satisfies the designing request.

Key words: Amplification circuit Demarcation, Elasticity element, Force sensor