关键词: 毛刺, 微零件, 最大内接圆, 最小二乘拟合

Abstract: With developed microscope measurement system, a research is made in the optical feature of the anomaly edge of minor accessory processed by means of quasi-LIGA. An approach of burr recognition on the basis of variation of gray-levels is proposed, and a simple means of measuring the thickness and highness of a burr is developed, with the precision reaching 5 μm. On the basis of gray-graph, the threshold value required in the thresholding transformation function is educed; The binary image is differentiated with a Laplacian, and then the edge of minor accessory is detected exactly. A comparison, which illustrates the feasibility of maximum incircle with respect to data and image, is made between the least square fit and the maximum incircle, and an image processing method is developed to measure the internal hole of micro accessory.

Key words: Maximum incircle, Burr, Least square fit, Micro accessory