压电驱动的六自由度微振动主被动隔离单元

doi:10.3901/JME.260307

机械工程学报 ›› 2026, Vol. 62 ›› Issue (13): 135-143.doi: 10.3901/JME.260307

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压电驱动的六自由度微振动主被动隔离单元

申妍¹, 张跃², 谢溪凌¹, 张志谊¹

1. 上海交通大学机械系统与振动全国重点实验室上海 200240;
2. 上海船舶设备研究所上海 200003

收稿日期:2025-07-09 修回日期:2025-12-30 发布日期:2026-08-28
作者简介:申妍，女，1995年出生，博士，助理研究员。主要研究方向为振动分析及控制。E-mail：shenya@sjtu.edu.cn;张志谊(通信作者)，男，1970年出生，博士，教授，博士研究生导师。主要研究方向为振动控制原理、方法与器件。E-mail：chychang@sjtu.edu.cn
基金资助:
国家自然科学基金资助项目(52471332，12472090)。

Six-DOF Active/passive Isolator with Integrated Piezoelectric Actuators for Micro-vibration Control

SHEN Yan¹, ZHANG Yue², XIE Xiling¹, ZHANG Zhiyi¹

1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240;
2. Shanghai Marine Equipment Research Institute, Shanghai 200003

Received:2025-07-09 Revised:2025-12-30 Published:2026-08-28

摘要/Abstract

摘要： 考虑微振动控制对高性能主被动隔振器件的特殊需求，提出压电驱动的双层夹心六自由度主被动隔振单元及控制方法，通过压电堆叠作动器、惯性体与被动隔振器的紧凑布置以及惯性体振动控制，实现振源谐波振动多向传递的有效抑制。根据广义变分原理建立负载-隔振单元-弹性基础耦合系统动力学模型，然后基于频域最优控制假设分析多向主被动隔振单元的振动传递可控性，最后结合实验系统获得主被动隔振单元的实际性能。测试结果表明：主被动联合控制能够在被动隔振基础上进一步减少振动传递，多向主被动隔振单元在0～300 Hz的控制频带内使各控制误差点的振级至少衰减18 dB，考核点的三向振动总级衰减约34 dB，强线谱幅值至少衰减15 dB。

关键词: 压电驱动, 主被动隔振, 六自由度控制, 微振动

Abstract: A six-DOF active/passive isolator with integrated piezoelectric actuators is proposed to meet the special requirements of micro vibration control. This design compactly arranges piezoelectric actuators, an inertial body, and a passive isolator to suppress multi-directional transmission of harmonic vibrations by controlling the vibrations of the inertial body. Firstly, a dynamic model of the coupling system including the load, the isolator, and the elastic foundation is established based on the generalized variational principle. Next, the vibration controllability of the proposed multi-directional active/passive isolator is analyzed based on the assumption of frequency domain optimal control. Finally, the actual performance of the active/passive isolator is obtained by experiments. The test results demonstrate that hybrid active-passive control significantly reduces vibration transmission compared to passive isolation alone. Within the frequency range of 0-300 Hz, the vibration levels of error points can be attenuated by at least 18dB with the multi-directional active/passive isolator. Additionally, the total vibration level of the monitoring point in all three directions is reduced by approximately 34 dB, while the amplitude of the strong tonal vibrations decreases by at least 15 dB.

Key words: micro-vibration, active/passive vibration isolation, six-DOF control, piezoelectric actuator

中图分类号:

TB535

申妍, 张跃, 谢溪凌, 张志谊. 压电驱动的六自由度微振动主被动隔离单元[J]. 机械工程学报, 2026, 62(13): 135-143.

SHEN Yan, ZHANG Yue, XIE Xiling, ZHANG Zhiyi. Six-DOF Active/passive Isolator with Integrated Piezoelectric Actuators for Micro-vibration Control[J]. Journal of Mechanical Engineering, 2026, 62(13): 135-143.

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压电驱动的六自由度微振动主被动隔离单元

Six-DOF Active/passive Isolator with Integrated Piezoelectric Actuators for Micro-vibration Control

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