压电驱动柔顺夹持器的夹持力传感分析与实验

doi:10.3901/JME.260172

机械工程学报 ›› 2026, Vol. 62 ›› Issue (9): 52-61.doi: 10.3901/JME.260172

• 机器人及机构学 • 上一篇

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压电驱动柔顺夹持器的夹持力传感分析与实验

刘敏¹, 张佳¹, 占金青¹, 朱本亮², 王华^3,4, 张宪民²

1. 华东交通大学机电与车辆工程学院南昌 330013;
2. 华南理工大学机械与汽车工程学院广州 510640;
3. 赣州科视光学科技有限公司赣州 341699;
4. 广东科视光学技术股份有限公司东莞 523000

收稿日期:2025-09-08 修回日期:2026-01-15 发布日期:2026-07-08
作者简介:刘敏，男，1990年出生，博士，副教授。主要研究方向为柔顺机构、拓扑优化。E-mail：lmin2016@foxmail.com;占金青(通信作者)，男，1979年出生，博士，教授，博士研究生导师。主要研究方向为柔顺机构、结构优化设计。E-mail：zhan_jq@126.com
基金资助:
国家自然科学基金(52165002,52065019)、赣鄱俊才支持计划-主要学科学术和技术带头人培养(20232BCJ23021)和江西省自然科学基金(20224BAB204041,20242BAB26067,20232BCJ25012)资助项目。

Analysis and Experiment of Gripping Force Sensing of Piezoelectrically Driven Compliant Gripper

LIU Min¹, ZHANG Jia¹, ZHAN Jinqing¹, ZHU Benliang², WANG Hua^3,4, ZHANG Xianmin²

1. School of Mechatronics and Vehicle Engineering, East China Jiaotong University, Nanchang 330013;
2. School of Mechanical & Automotive Engineering, South China University of Technology, Guangzhou 510640;
3. Ganzhou KST Optical Co., LTD., Ganzhou 341699;
4. Guangdong Provincial Engineering Technology Research Center of Digital Lithography, Guangdong KST Optical Co., Ltd., Dongguan 523000

Received:2025-09-08 Revised:2026-01-15 Published:2026-07-08

摘要/Abstract

摘要： 随着微操作技术在高精度领域的应用日益广泛，实现对夹持力的实时感知成为提升柔顺夹持器性能的关键。针对压电驱动柔顺夹持器，开展其基于应变片的集成式力传感功能的建模、分析与实验研究。通过粘贴应变片于柔性铰链处构建力传感单元，建立了夹持力与应变之间的理论模型，并分析了柔性梁结构参数对应变响应的影响。研究结果表明，减小柔性梁的宽度与厚度、增加其长度可显著提高表面最大应变。有限元仿真验证了理论模型的准确性，相对误差仅为4.22%。通过实验标定，建立了夹持力与应变的线性关系，并进一步分别标定了夹持直径为800 μm与400 μm铜线时压电驱动器的输入电压、输入位移与应变的关系。采用最小二乘法对实验数据平均值进行三阶多项式拟合，得到了输入电压/位移与夹持力之间的函数关系，为实现夹持力精确预测与动态调控提供了有效方法。

关键词: 柔顺夹持器, 力传感, 应变片, 压电驱动, 多项式拟合

Abstract: With the increasing application of micromanipulation technology in high-precision applications, achieving real-time sensing of the gripping force is crucial for improving the performance of compliant grippers. This study modeled, analyzed, and experimentally investigated the integrated force sensing function of a piezoelectrically driven compliant gripper based on strain gauges. By attaching strain gauges to the flexure hinge to construct a force sensing unit, a theoretical model of the relationship between gripping force and strain was established, and the influence of the flexible beam’s structural parameters on the strain response is analyzed. The results showed that reducing the width and thickness of the flexible beam and increasing its length significantly increased the maximum surface strain. Finite element simulations validated the accuracy of the theoretical model, with a relative error of only 4.22%. Experimental calibration established a linear relationship between gripping force and strain. The input voltage, input displacement, and strain relationships of the piezoelectric actuator were further calibrated for gripping copper wires with diameters of 800 μm and 400 μm, respectively. A third-order polynomial fit was performed on the average values of the experimental data using the least squares method to obtain a functional relationship between the input voltage/displacement and gripping force, providing an effective method for accurate prediction and dynamic control of gripping force.

Key words: compliant gripper, force sensing, strain gauge, piezoelectric drive, polynomial fitting

中图分类号:

TH823

刘敏, 张佳, 占金青, 朱本亮, 王华, 张宪民. 压电驱动柔顺夹持器的夹持力传感分析与实验[J]. 机械工程学报, 2026, 62(9): 52-61.

LIU Min, ZHANG Jia, ZHAN Jinqing, ZHU Benliang, WANG Hua, ZHANG Xianmin. Analysis and Experiment of Gripping Force Sensing of Piezoelectrically Driven Compliant Gripper[J]. Journal of Mechanical Engineering, 2026, 62(9): 52-61.

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参考文献

[1] LIU M，ZHAN J，ZHU B，et al. Topology optimization of compliant mechanism considering actual output displacement using adaptive output spring stiffness[J]. Mechanism and Machine Theory，2020，146：103728.
[2] LING M，YUAN L，ZHANG X. Geometrically nonlinear analysis of compliant mechanisms using a dynamic beam constraint model (DBCM)[J]. Mechanism and Machine Theory，2024，191：105489.
[3] 张赫，李海铭，张佳闪，等. 面向腔镜微创手术的连续体机械手关键技术与研究进展[J]. 机械工程学报，2023，59(19)：44-64. ZHANG He，LI Haiming，ZHANG Jiashan，et al. Key technologies and research progress of continuum manipulators for minimally invasive laparoscopic surgery[J]. Journal of Mechanical Engineering，2023，59(19)：44-64.
[4] LIU M，LU L，ZHAN J，et al. Layout optimization of compliant mechanism with embedded components using moving morphable component (MMC) method[J]. Mechanism and Machine Theory，2026，219：106301.
[5] 张宪民，朱本亮，李海，等. 柔顺精密定位与操作机构研究进展[J]. 机械工程学报，2023，59(19)：24-43. ZHANG Xianmin，ZHU Benliang，LI Hai，et al. Recent advances in compliant precision positioning and manipulating mechanisms[J]. Journal of Mechanical Engineering，2023，59(19)：24-43.
[6] GAN J，XU H，ZHANG X，et al. Design of a compliant adjustable constant-force gripper based on circular beams[J]. Mechanism and Machine Theory，2022，173：104843.
[7] XU H，ZHANG X，ZANG H，et al. An SMA-based compliant adjustable constant force gripper for micro-assembly[J]. International Journal of Mechanical Sciences，2024：109430.
[8] BARATI H，BARAZANDEH F，JABARI A，et al. Design and fabrication of a multi-purpose four arm electrothermal microgripper：A novel approach to control maximum gripping force limit[J]. Physica Scripta，2024，99(8)：085905.
[9] DAI J，FENG C，XIE J，et al. Design and control of an analog optical switch based on the coupling of an electrothermal actuator and a mass–spring system[J]. IEEE/ASME Transactions on Mechatronics，2023，28(5)：2517-2528.
[10] LV Z，LIU Z，TANG Y，et al. Photo-induced electrostatic actuators towards micro gap regulator and micro gripper based on lead lanthanum zirconate titanate ceramics[J]. Materials & Design，2023，232：112078.
[11] CHOI M Y，KIM K，KIM K，et al. Rapid and spatially programmed electrostatic actuation of anisotropic polymers[J]. Chemical Engineering Journal，2023，475：146237.
[12] WANG C，WANG Y，FANG W，et al. Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm[J]. Microsystems & Nanoengineering，2022，8(1)：3.
[13] LI Z，CHEN L，MA Y，et al. Multi-physics coupling simulation and design of magnetic field-driven soft microrobots in liquid environments[J]. International Journal of Mechanical Sciences，2024，272：109136.
[14] KAN Q，SHI W，SONG D，et al. A micromechanical constitutive model of high-temperature shape memory alloys[J]. International Journal of Mechanical Sciences，2023，251：108328.
[15] KIM M S，HEO J K，RODRIGUE H，et al. Shape memory alloy (SMA) actuators：The role of material，form，and scaling effects[J]. Advanced Materials，2023，35(33)：2208517.
[16] 刘英想，邓杰，常庆兵，等. 压电驱动技术研究进展与展望[J]. 振动、测试与诊断，2022，42(6)：1045-1061. LIU Yingxiang，DENG Jie，CHANG Qingbing，et al. Progress and prospects in piezoelectric actuation technologies[J]. Journal of Vibration，Measurement & Diagnosis，2022，42(6)：1045-1061.
[17] 李冲，童玉健，梁康，等. 压电驱动微型精密夹持机构设计与实验研究[J]. 中国机械工程，2022，33(11)：1302-1308. LI Chong，TONG Yujian，LIANG Kang，et al. Design and experimental study of piezoelectric actuated micro precision clamping mechanisms[J]. China Mechanical Engineering，2022，33(11)：1302-1308.
[18] WANG R，YANG L，LI Z，et al. Design and control of a piezoelectric-actuated kangaroo-inspired bionic compliant mechanism for LDI machines[J]. Chinese Journal of Mechanical Engineering，2025，38(1)：116.
[19] ZHANG S，LIU J，DING H，et al. Dynamic modeling and experimental verification of an RPR type compliant parallel mechanism with low orders[J]. Chinese Journal of Mechanical Engineering，2024，37(1)：78.
[20] 许锰，杨依领，吴高华，等. 二自由度并联压电粘滑定位平台[J]. 机械工程学报，2024，60(11)：250-258. XU Meng，YANG Yiling，WU Gaohua，et al. Two-degree-of-freedom parallel piezoelectric stick-slip positioning platform[J]. Journal of Mechanical Engineering，2024，60(11)：250-258.
[21] DAS T K，SHIRINZADEH B，AL-JODAH A，et al. A novel compliant piezoelectric actuated symmetric microgripper for the parasitic motion compensation[J]. Mechanism and Machine Theory，2021，155：104069.
[22] CHEN X，XIE Z，TAN H，et al. Design and mechanical modeling of high-magnification and low-parasitic displacement microgripper with three-stage displacement amplification[J]. Mechanism and Machine Theory，2023，190：105463.
[23] ZUBIR M N M，SHIRINZADEH B. Development of a high precision flexure-based microgripper[J]. Precision Engineering，2009，33(4)：362-370.
[24] 林超，李坪洋，沈忠磊，等. 压电驱动微夹持器特性分析[J]. 仪器仪表学报，2019，40(7)：224-232. LIN Chao，LI Pingyang，SHEN Zhonglei，et al. Characteristic analysis of the micro gripper driven by piezoelectric actuator[J]. Chinese Journal of Scientific Instrument，2019，40(7)：224-232.
[25] XU Q. Design，fabrication，and testing of an MEMS microgripper with dual-axis force sensor[J]. IEEE Sensors Journal，2015，15(10)：6017-6026.
[26] PAN P，QU J，ZHANG W，et al. Robotic stimulation of freely moving drosophila larvae using a 3D-printed micro force sensor[J]. IEEE Sensors Journal，2018，19(8)：3165-3173.
[27] KANE B J，CUTKOSKY M R，KOVACS G T A. A traction stress sensor array for use in high-resolution robotic tactile imaging[J]. Journal of Microelectromechanical Systems，2002，9(4)：425-434.
[28] FAUVER M E，DUNAWAY D L，LILIENFELD D H，et al. Microfabricated cantilevers for measurement of subcellular and molecular forces[J]. IEEE Transactions on Biomedical Engineering，1998，45(7)：891-898.
[29] SPINNER S，BARTHOLOMEYCZIK J，BECKER B，et al. Electromechanical reliability testing of three-axial silicon force sensors[J]. arXiv preprint arXiv：0711.3289，2007.
[30] ZHOU C，XIA M，XU Z. Design and optimization of a quadrupedal dynamic disturbance force measurement platform using strain gauges[J]. Mechanical Systems and Signal Processing，2023，188：110032.
[31] ZHANG Q，ZHANG J. Internal force monitoring and estimation of a long-span ring beam using long-gauge strain sensing[J]. Computer-Aided Civil and Infrastructure Engineering，2021，36(1)：109-122.
[32] 崔东辉，张晓丽，刘同胜. 一种高可靠性电涡流位移传感器的设计[J]. 电子测量技术，2013，36(12)：87-91. CUI Donghui，ZHANG Xiaoli，LIU Tongsheng，et al. Design of eddy current displacement sensor with high reliability[J]. Electronic Measurement Technology，2013，36(12)：87-91.
[33] LIU M，ZHANG Q，SHAO Y，et al. Research of a novel 3D printed strain gauge type force sensor[J]. Micromachines，2018，10(1)：20.
[34] LIU M，ZHANG J，ZHAN J，et al. Design and development of a 3-DOF compliant gripper with in-plane and out-of-plane motion[J]. Precision Engineering，2025，95：136-150.

压电驱动柔顺夹持器的夹持力传感分析与实验

Analysis and Experiment of Gripping Force Sensing of Piezoelectrically Driven Compliant Gripper

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