喷印柔性压力传感器试验研究

doi:10.3901/JME.2019.11.090

机械工程学报 ›› 2019, Vol. 55 ›› Issue (11): 90-97.doi: 10.3901/JME.2019.11.090

• 特邀专栏：共融机器人 • 上一篇下一篇

喷印柔性压力传感器试验研究

罗毅辉¹, 彭倩倩¹, 朱宇超¹, 王广顺¹, 吴德志^1,3, 朱睿², 谢瑜¹, 孙道恒¹

1. 厦门大学机电工程系厦门 361005;
2. 厦门大学动力工程系厦门 361005;
3. 厦门大学深圳研究院深圳 518057

收稿日期:2018-11-26 修回日期:2019-03-01 出版日期:2019-06-05 发布日期:2019-06-05
通讯作者: 吴德志(通信作者),男,1977年出生,博士,教授,博士研究生导师。主要研究方向为微纳制造、柔性电子及应用。E-mail:wdz@xmu.edu.cn;朱睿(通信作者),男,1980年出生,博士,助理教授。主要研究方向为流体力学。E-mail:zhurui@xmu.edu.cn
作者简介:罗毅辉,男,1993年出生。主要研究方向为电子皮肤。E-mail:19920161151457@stu.xmu.edu.cn
基金资助:
国家自然科学基金（91648114）、中央高校基本业务费专项资金（厦门大学：20720170037）、浙江省重点研发计划（2018C01036）和深圳市科技计划项目（20180211151853569）资助项目。

Experimental Study of Flexible Pressure Sensor via Direct Writing

LUO Yihui¹, PENG Qianqian¹, ZHU Yuchao¹, WANG Guangshun¹, WU Dezhi^1,3, ZHU Rui², XIE Yu¹, SUN Daoheng¹

1. Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005;
2. Department of Power Engineering, Xiamen University, Xiamen 361005;
3. Shenzhen Research institute of Xiamen University, Shenzhen 518057

Received:2018-11-26 Revised:2019-03-01 Online:2019-06-05 Published:2019-06-05

摘要/Abstract

摘要： 柔性压力传感器是智能机器人和生物医疗等典型应用领域中的关键部件。针对10~50 kPa中等压力下对柔性压力传感器的高灵敏度、良好压力分辨率和快速响应需求，提出在PDMS基底上直写喷印石墨烯纳米片（GNPs）/多壁碳纳米管（MWCNT）构建S型折线图案化敏感单元，结合封装层微结构阵列，制备中压高灵敏度、低检测限的柔性压力传感器。试验结果表明，在压力为0~15 kPa和15~40 kPa的条件下，该传感器灵敏度分别为0.114 kPa^-1和1.41 kPa^-1，响应/恢复速度快（约100 ms/50 ms）。同时，其也可检测低至约3 Pa的微小压力。同时，该传感器更是能对不同发声进行准确的区分识别，对不同的指压信号进行精确稳定反馈。可见，喷印制造柔性压力传感器将为语音识别、人工假肢、制备高性能电子皮肤和医疗康复器件等提供可能的优选方案。

关键词: 电子皮肤, 柔性压力传感器, 石墨烯纳米片, 微结构, 直写喷印

Abstract: Flexible pressure sensors are crucial building blocks for potential applications including intelligent robots and biomedical engineering. According to its demand of high resistivity, good pressure resolution and fast response for sensing medium pressure between 10 kPa and 50 kPa, a flexible pressure sensor is fabricated by direct writing graphene nanoplatelets (GNPs)/multi-walled carbon nanotubes (MWCNT) composite on a PDMS substrate to construct an S-shape sensing element, together with a microstructure-arrayed package component. Experiment results show that its sensitivity is about 0.114 kPa^-1 and 1.41 kPa^-1, under pressure of 0-15 kPa and 15-40 kPa respectively. Its response/recovery time is about 100/50 ms, which is faster than that of most medium pressure sensors. It also can sense subtle pressure change about 3 Pa. It is characterized to be of better repeatability and cycling stability. At the same time, the different phonation can be accurately distinguished and recognized by the sensor, and the different finger pressure signals can be accurately and stably feedback. Thus, such sensors will offer a possible optimized choice for speech recognition, artificial limb, fabrication of electronic skins and medical rehabilitation devices with high performance.

Key words: direct write, electronic skins, flexible pressure sensor, graphene nanoplatelets, microstructures

中图分类号:

TP212

罗毅辉, 彭倩倩, 朱宇超, 王广顺, 吴德志, 朱睿, 谢瑜, 孙道恒. 喷印柔性压力传感器试验研究[J]. 机械工程学报, 2019, 55(11): 90-97.

LUO Yihui, PENG Qianqian, ZHU Yuchao, WANG Guangshun, WU Dezhi, ZHU Rui, XIE Yu, SUN Daoheng. Experimental Study of Flexible Pressure Sensor via Direct Writing[J]. Journal of Mechanical Engineering, 2019, 55(11): 90-97.

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喷印柔性压力传感器试验研究

Experimental Study of Flexible Pressure Sensor via Direct Writing

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