CoCrFeNi掺杂DLC薄膜的摩擦载荷敏感性研究

doi:10.3901/JME.2025.10.117

机械工程学报 ›› 2025, Vol. 61 ›› Issue (10): 117-127.doi: 10.3901/JME.2025.10.117

• 特邀专栏：高端装备表面强化防护与再制造 • 上一篇

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CoCrFeNi掺杂DLC薄膜的摩擦载荷敏感性研究

张维尧¹, 韩世超¹, 马三保¹, 李振², 陈朱池³, 赵海朝⁴, 马国政⁵, 周野飞¹

1. 燕山大学机械工程学院秦皇岛 066004;
2. 上海交通大学机械与动力工程学院上海 200240;
3. 福建龙溪轴承(集团)股份有限公司漳州 363000;
4. 陆军装甲兵学院机械产品再制造国家工程研究中心北京 100072;
5. 陆军装甲兵学院装备再制造技术国防科技重点实验室北京 100072

收稿日期:2024-09-06 修回日期:2024-12-11 发布日期:2025-07-12
作者简介:张维尧，男，1997年出生，博士研究生。主要研究方向为非晶碳薄膜增韧机理。E-mail：yonovember@163.com;周野飞(通信作者)，男，1985年出生，博士，副教授，博士研究生导师。主要研究方向为机械摩擦学与表面工程。E-mail：yfzhou@ysu.edu.cn
基金资助:
河北省自然科学基金杰出青年(E2024203093)、中央引导地方(36Z1809G)和国家自然科学基金(52375208，52371077，52205205)资助项目。

Friction Load Sensitivity of CoCrFeNi Doped DLC Films

ZHANG Weiyao¹, HAN Shichao¹, MA Sanbao¹, LI Zhen², CHEN Zhuchi³, ZHAO Haichao⁴, MA Guozheng⁵, ZHOU Yefei¹

1. School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004;
2. School of Mechanical and Power Engineering, Shanghai Jiaotong University, Shanghai 200240;
3. Fujian Longxi Bearing (Group) Corp., Ltd., Zhangzhou 363000;
4. National Engineering Research Center for Remanufacturing, Army Academy of Armored Forces, Beijing 100072;
5. National Key Laboratory for Remanufacturing, Army Academy of Armored Forces, Beijing 100072

Received:2024-09-06 Revised:2024-12-11 Published:2025-07-12

摘要/Abstract

摘要： 类金刚石(Diamond-like carbon,DLC)薄膜作为一种性能优异的固体自润滑涂层，在工业中已经得到了广泛的应用。然而，在高摩擦载荷工况下，DLC薄膜常受限于高残余应力和韧性不足等问题。为提高薄膜在高摩擦载荷下的使役能力，采用非平衡离子束辅助增强磁控溅射技术在304不锈钢基体上制备了不同CoCrFeNi高熵合金掺杂量的DLC薄膜，并对其微观结构、纳米力学性能、摩擦磨损性能及机制进行了研究。结果表明，随着CoCrFeNi掺杂量的增加，DLC薄膜中sp²杂化碳含量上升，薄膜表面处的I_D/I_G值由1.27提升至2.33，G峰从1 540 cm^-1上升至1 558 cm^-1。同时，内应力由1.51 GPa下降至0.64 GPa。在微纳力学性能方面，当掺杂靶电流为0.6 A时，薄膜的硬度和弹性模量保持稳定，并且其摩擦因数和磨损率也表现出最优的减摩耐磨性能。然而，当掺杂靶电流超过0.6 A时，过高的掺杂量导致薄膜结构破坏，力学性能和摩擦学性能都出现了明显的下降。

关键词: 类金刚石薄膜, 纳米力学性能, 载荷, 摩擦学行为

Abstract: Diamond-like carbon(DLC) films have been widely used in industry as a solid self-lubricating coating with excellent performance. However, under high frictional load conditions, DLC films are often limited by high residual stresses and insufficient toughness. In order to improve the serviceability of the films under high frictional loads, DLC films with different CoCrFeNi high entropy alloy doping are prepared on 304 stainless steel substrate by non-equilibrium ion beam assisted enhanced magnetron sputtering technique and their microstructure, nanomechanical properties, frictional wear characteristics and mechanisms are investigated. The results show that with the increase of CoCrFeNi doping, the sp² hybridized carbon content in the DLC films increased, the ID/IG value at the surface of the films increases from 1.27 to 2.33, and the G peak increases from 1 540 cm^-1 to 1 558 cm^-1. At the same time, the internal stress decreases from 1.51 GPa to 0.64 GPa. In terms of micro-and nano-mechanical properties, the hardness and Young’s modulus of the films remain stable at a doping target current of 0.6 A, and their friction coefficients and wear rates show optimal friction reduction and wear resistance. However, when the doping target current exceeds 0.6 A, the excessive doping leads to the structural damage of the films, and the mechanical and tribological properties show a significant decrease.

Key words: diamond-like films, nanomechanical properties, loading, tribological behavior

中图分类号:

TH117
TB383

张维尧, 韩世超, 马三保, 李振, 陈朱池, 赵海朝, 马国政, 周野飞. CoCrFeNi掺杂DLC薄膜的摩擦载荷敏感性研究[J]. 机械工程学报, 2025, 61(10): 117-127.

ZHANG Weiyao, HAN Shichao, MA Sanbao, LI Zhen, CHEN Zhuchi, ZHAO Haichao, MA Guozheng, ZHOU Yefei. Friction Load Sensitivity of CoCrFeNi Doped DLC Films[J]. Journal of Mechanical Engineering, 2025, 61(10): 117-127.

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CoCrFeNi掺杂DLC薄膜的摩擦载荷敏感性研究

Friction Load Sensitivity of CoCrFeNi Doped DLC Films

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